IMEC announces printing of the first Extreme Ultra Violet (EUV)-light wafers with ASML NXE:3100 mounted with XTREME’s laser-assisted discharge plasma (LDP) source. For details, visit Imec News.USHIO Inc.

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HOME > News > Products > IMEC announces printing of the first Extreme Ultra Violet (EUV)-light wafers with ASML NXE:3100 mounted with XTREME’s laser-assisted discharge plasma (LDP) source. For details, visit Imec News.

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IMEC announces printing of the first Extreme Ultra Violet (EUV)-light wafers with ASML NXE:3100 mounted with XTREME’s laser-assisted discharge plasma (LDP) source. For details, visit Imec News.

For detailed information, please refer to IMEC Website

Appendix

XTREME technologies GmbH Product Positioning　（PDF：140KB）
Rationale of Laser-assisted Discharge Plasma (LDP) Technology　（PDF：2.54MB）

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