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Product History

Year / Product and Technology Light Source Lighting Equipment
1916 ・Home-use incandescent light bulbs  
1955 ・UV lamps for diazo copiers  
1957

・Xenon short-arc lamps for movie projectors

  
1960

・Xenon flash lamps for photography

 High-pressure UV lamps for integrated circuit (IC) photo etching
1961 ・Iodine lamps  
1964 ・Halogen lamps for automobiles  
1965 ・Xenon pulsed lamps for plate making ・Solar simulator for Tokyo University
1966   ・Flash photoanalysis equipment
1969

・30-kW Water-cooled xenon short-arc lamp for solar simulators

  
1971 ・Laser-pumping high-power xenon flash lamps for nuclear fusion experiment at Osaka University  
1972 ・UV lamps for water purification ・UV sterilization system
Air purification system
1973   ・Large-scale solar simulator for National Space Development Agency (NASDA) program
SPOT CURE minute-space UV curing system
1974 ・UV lamps for UV ink curing

・UNICURE instant curing system

1976

・High-power halogen lamp for luring squid

  
1977 ・Deep UV lamps for large-scale integrated (LSI) circuit photolithography  
1978 ・Halogen fog lamps for Italian automotive designer Michelotti Auto Accessories
Metal halide lamps for attracting fish		  
1979 ・Low-wattage halogen lamps for fiber-optics plain paper copiers ・Xenon lamps for facsimile toner fusion
1980   ・Solar simulator for inspecting solar cells
1981 ・High-powered sterilizer lamp ・UNILIZER high-powered UV sterilization system
1982   ・Annealing systems for semiconductor manufacturing
1983   ・PHOTOLEX UV cleaning system
1984 ・Compact fluorescent lamp for liquid crystal display (LCD) TVs
・Compact fluorescent lamp for image reader		  
1985  

・UNIHARD photoresist hardening system

・CO2 laser marking system

1986 ・Sapphire bulbs ・Low-temperature UV instant curing system
Lamp units for semiconductor exposure equipment
1987 ・Halogen lamp with IR reflector film

・Light-activated catalyzing home air purifying unit
Salon tanning equipment

1988 ・Far IR halogen heater lamp ・Plasma polymerization film replica production system
1989  

・TAB exposure system
Peripheral exposure system

UV Intensity Meter

1990 ・Metal halide lamp for lighting applications
Narrow-band i-line lamp for semiconductor manufacturing		  
1991 ・Helium-cadmium (He-Cd) laser  
1992   ・Step exposure system
1993

・Dielectric barrier discharge excimer lamps

・MULTILIGHT multiple-purpose exposure unit

1994   ・Large-area projection exposure systems
・Excimer vacuum ultraviolet (VUV)/O3 system
1995

・External electrode rare gas lamps

 ・Vacuum chamber-type excimer photon source system
・Rf-CO2 laser marking system
1996 ・Blue halogen lamps for automobiles ・Excimer VUV/O3 system for LCD panels
・YAG laser marking systems
1997

・Min-EB ultracompact electron beam

  
1998

・NSH Lamps for projectors

  
1999  

・UX-5 Step & Repeat projection exposure system for high Precision
Printed wiring Boards

2001   ・Spectro-reflectmeter
Flash Lamp Annealing System
Min-EB labo STM-Chamber Ultra-Low Electron Beam Radiation System
2002   ・TAB Tape Edge Exposure System
2003   ・UX-7 Step & Repeat projection exposure system for Super connect
2004  

・ODF UV Curing System

・TAB/COF Automatic Inspection System

・Spray Photoresist Coater
・μTAS Bonding System

2005   ・Foreign substance inspection system for masks/pellicles
2006  

・TheraBeam VR630 Infrared Ray Remedy vessel

2007

・ArF eximer lamps

  
2008

・Applying Lead-Free Fluorescent Lamp XEFL®

・TheraBeam® UV308 Excimer UV Phototherapy Device


・Banalyst®Ace, a Safe, Rapid and Easy Microvolume Blood Testing System

2009  

・LED Spot UV Irradiation Unit "SPL-1"

2010  

・UX-5 Step & Repeat Projection Exposure System of Module-type for packaging Substrate
・Projection Exposure System for LED chips
・Projection Exposure System for Power Semiconductors

2011 ・LED Modules for Office Automation Equipment

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