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Micro TAS Bonding System

This system is designed to instantaneously bond glass and PDMS (silicon rubber), which form the micro TAS substrate, using a UV ray vacuum instead of adhesives.
Accurate bonding is possible as the materials are aligned and bonded after irradiating the vacuum UV ray from excimer lamps.

Characteristics

No adhesive is needed.

The substrates (glass and PDMS or two PDMS sheets) are bonded firmly, as irradiating the UV ray vacuum reforms the surface.

No vacuum environment, heating or pressurization is needed at the time of bonding.

Bonding is possible only by lamp irradiation, without exerting loads on the substrate.

Compact equipment (separated type)

The system is divided into an irradiation section and an alignment section, allowing flexible equipment installation. The irradiation section alone can be used in research and development works for photocleaning, surface reform and others.

High-precision alignment stage

The system is compatible with sheet-feeding 4-inch wafers. Please consult us for equipment compatible with the 6-inch or larger wafers and the automatic conveyance mechanism.

Easy maintenance

Maintenance is easy as only the lamp replacement is necessary and there is no shutter or other driving sections. The lamp does not need to be lit all the time, and can be turned on and off any time.

Major Applications

  • Test production, development and volume production of micro TAS
  • Surface reform of substrates
  • Photocleaning of substrate glass surface and others

For further information, please contact:

Tokyo Tel: +81 3-6361-5592, Fax: +81 3-6361-5599

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