Visual Inspection Equipment

Presents visual inspection systems for wafers and masks as well as circuits and glass surfaces for flexible printed substrates

Inspection system to detect foreign substances in masks/pellicles This equipment is used to facilitate quick detection of foreign substances adhering to the upper reticle surface and the lower pellicle surface of the reticles for exposure systems.	Optical Modulex--Glass surface inspection system This light source system allows standardized component units to be assembled according to the purpose.