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Inspection System to Detect Foreign Substances in Masks/Pellicles

The system allows rapid detection of foreign substances adhering to the upper reticle surface and the lower pellicle surface of the reticles in exposure systems.
After the mask case is set in position, the unit automatically executes all processes up to the point when the inspection results are displayed. ID control using barcodes can be implemented to record the inspection results in a log. This equipment prevents defective devices caused by reticle defects from escaping detection.

Characteristics

Good cost performance

Minimizes initial costs, and requires negligible running costs. Offers high throughput and has a small footprint to achieve low cost of ownership (COO).

Small footprint

Has a footprint of just 600mm x 1200mm. Two sheets can be set for gratings.

High-speed inspection

Conducts high-speed inspection at a maximum rate of 80sec/sheet, enhancing productivity.

Simple operation

There is no need to engage in complex operations. Inspection is performed automatically with the flick of a switch.

分Easy analysis

Facilitates analysis of results, and offers optional online support.

Figure illustrating the inspection set-up

Operation screen

Major Application

  • Carries out inspections to detect foreign substances adhering to the surface of the upper reticle and lower pellicle.

For further information, please contact:

Tokyo Tel: +81 3-6361-5592, Fax: +81 3-6361-5599

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