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Semiconductor Manufacturing

Presents optical products used in semiconductor manufacturing processes

Semiconductor Manufacturing

Ultra high-pressure UV lamps These high-intensity lamps have a long life and constant radiation intensity. They make effective use of 436nm, 405nm and 365nm ultraviolet rays.	Halogen heater These lamps use light as a heat source. They have very good features not found in other lights, such as superior flexibility and controllability, as well as a high level of efficiency and cleanliness. They also have a compact and lightweight design.
Flash lamp anneal The equipment emits large volumes of pulsating light in short intervals of several milliseconds. It enables processing within a small thermal budget, as only the surface temperature of the irradiated object increases.	Excimer lamps These lamps efficiently emit vacuum ultraviolet rays at wavelengths of 180nm or less.
Spot Cure Series?Spot UV exposure systems These easy-to-use spot UV exposure systems feature a built-in UV lamp. A diverse range of options is available to suit varying production lines and work pieces, including lenses and units.	Unihard--UV photoresist hardening and charge-erasing system The system is used for various applications such as enhancing plasma resistance during dry etching, facilitating photoresist degassing before ion implantation, preventing photoresist burning, erasing charges and stresses, and low-k curing.
Exposure systems Presents diverse exposure systems, including projection exposure systems (single-sided, simultaneous and step-and-repeat for large-area projection) and proximity projection systems	Visual inspection systems Presents visual inspection systems for flexible printed boards (FPBs) and other circuits and glass surfaces
Optical measurement systems Presents accurate and easy-to-use measuring systems for light volume and intensity, developed from the user's point of view using our expertise as a light source manufacturer