UV Hardening and Fixing Systems

Presents photo ultraviolet hardening and fixing systems that do not give off heat. These systems have a wide range of applications from the precision fixing of electronic and optical components in a small area to the photoresist hardening and bonding of liquid crystal panels.

UV Hardening and Fixing Systems

Unihard--UV photoresist hardening and charge-erasing system The system is used for various applications such as enhancing plasma resistance during dry etching, facilitating photoresist degassing before ion implantation, preventing photoresist burning, erasing charges and stresses, and low-k curing.	Spot Cure Series--Spot UV exposure systems These easy-to-use spot UV exposure systems feature a built-in UV lamp. A diverse range of options is available to suit varying production lines and work pieces, including lenses and units.
Optical Modulex--Multipurpose light source system This light source system allows standardized component units to be assembled according to the purpose.

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