Surface modification

  • Modification
  • Printing
  • Semiconductors
  • Functional Materials
  • Biology and Chemistry
  • MEMS, Electronic Components
  • Printed Circuit Board and PKG
  • Energy
  • Liquid Crystal Display
1. Utilizing the high efficacy of 172nm wavelength for improving air quality in the atmosphere
Breaking the molecular bonds of organic matter requires light energy that exceeds the binding energy of the matter. The greater the energy absorption (the excitation) of a substance , the easier it is to induce a reaction (decomposition) and the shorter the processing time required. Binding energies that cannot be broken using low voltage UV lamps can be dissolved using the 172nm wavelength produced by excimer lamps.

2. Generates excited oxygen atoms in large quantities, either as ozone or as active oxygen.
Compared to the 185nm wavelength of low voltage UV lamps, the absorption coefficient by molecular oxygen of the 172nm wavelength of excimer lamps is about 20 times greater. This not only makes it possible to generate active varieties of oxygen at high densities, but by working directly on oxygen enables generation of strongly excited oxygen with great oxidizing power.