Short-Arc Flash Lamp Lighting Power Supply

  • Others
  • Semiconductors

This power supply charges ultra-high-voltage capacitors for short-arc momentary-output flash lamps. Ideally suited for powering the light source for the new type VUV patterning exposure machines.

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Supplies hundreds of amperes to over 1000 Vpeak at 120 Hz
Suitable for other applications
Modularization and touch panel for easy operation

Installed light source