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Main applications and fields
UV photoresist curing systems Unihard
This ultraviolet irradiation device is used for photoresist curing in LSI manufacturing lines.
Equipped with a super high-pressure UV lamp and an excimer lamp, this system is used for various applications such as enhancing plasma resistance during dry etching, photoresist outgassing and burn prevention during ion implantation, neutralizing electrical charge, removing stress and low-k curing.
Charge neutralization systems
Strong, deep ultraviolet irradiation neutralizes electric charge on EPROM and Flash memory. Neutralizes electric charge that can be problematic for plasma processing.
UV instant curing equipment Unicure System
High-power, compact UV curing and drying equipment achieves low-temperature processing. Lamps and other components can be selected according to the UV intensity and irradiation area required for the intended purpose.
Instruction manuals here
LED spot UV irradiation unit SPL-2
This spot cure series LED type has over 30 years of actual results. By taking advantage of our optical technology developed up to now, we provide solutions to problems that could not be solved with conventional LED types. We propose products tailored to your needs.
Spot UV irradiation units Spot Cure Series
The "Spot Cure Series" takes advantage of our light system technology cultivated for over 30 years, in pursuit of ease of use and environmental considerations. We offer a wide variety of lens and unit options to suit line and workpiece conditions.