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Product name Product description Main applications and fields Wavelength
Power Supply Repair Services Various power supplies are accepted for repairs. We have repair facilities in China, Korea and Taiwan, enabling local repairs without requiring power supplies to be returned to Japan when problems occur. Please feel free to consult us during maintenance and repair. Technology Introduction Page For more details about this technology, please inquire at this page Inquiry Form
Large field stepper UX-5 Series UX-7 Series Large field stepper UX-5 Series UX-7 Series

Ushio provides specialized steppers for cutting-edge packaging applications employed in servers and PCs, and in portable devices such as smart phones and tablet PCs. The stepper is intended for package substrates using a stage corresponding to the panel size and Ushio's proprietary large-area projection lens technology cultivated from many years of expertise in light source and optical technology. High productivity is achieved while realizing the high resolution and overlay accuracy required for the latest packaging substrates.

【Component Technology】
- Includes the world's best-selling super high-pressure UV lamp
- Ushio's irradiation optical system boasts a high degree of uniformity
- Unrivaled large-area projector lens

Full-field projection aligner UX-4 Series Full field projection aligner UX-4 Series

This projection aligner uses our unique large area projector lens technology, light source and other optical technologies developed by Ushio over many years. Provides one-shot exposure of up to 8-inch wafers without touching the mask. Large depth of field enables proper exposure of non-flat wafers, achieving higher productivity and yield not possible with a proximity aligner.

【Component Technology】
- Includes the world's number one super high-pressure UV lamp
- Our own irradiation optical system boasting a high degree of uniformity
- Unrivaled large-area projector lens

Contact/proximity aligners UX-3 Series Contact/proximity aligners UX-3 Series

This mask aligner uses light source and optical technologies developed by Ushio over many years. This exposure device supports not only ihg rays, but the deep UV range as well.

【Component Technology】
- Includes the world's number one super high-pressure UV lamp
- Our own irradiation optical system boasting a high degree of uniformity

Manual type contact/proximity aligners UX-1 Series Manual type contact/proximity aligners UX-1 Series

This mask aligner uses light source and optical technologies developed by Ushio over many years. This exposure device supports not only ihg rays, but the deep UV range as well.

【Component Technology】
- Includes the world's number one super high-pressure UV lamp
- Our own irradiation optical system boasting a high degree of uniformity

Roll-to-roll lithography tool UFX Series Roll to roll lithography tool UFX Series

Currently Ushio's proximity/projection exposure systems for flexible substrates have a track record of over 800 units. Highly efficient high-resolution exposure is achieved by a projector lens that makes full use of our specially developed high-output lamp and our established reputation in optical system technology.

【Component Technology】
- Includes the world's number one super high-pressure UV lamp
- Our own irradiation optical system boasting a high degree of uniformity
- Unrivaled large-area projector lens

Excimer lamps/Excimer irradiation unit Excimer lamps/Excimer irradiation unit Excimer VUV light is the very high-energy light generated by lamps containing noble gases or noble-gas hydride compounds. Externally applying high-energy electrons to a sealed lamp containing a noble gas or noble gas hydride compound generates intense plasma discharge (dielectric barrier discharge). This plasma features high-energy electron content, and can be extinguished instantly. The plasma discharge instantly excites the atoms of the discharge gas (noble gas) to their excimer (Xe) state (high-energy orbital atoms form excimer excited molecules). The excimer-specific spectrum is emitted when atoms return from this excimer state to their original condition (ground state). This emission is called VUV light.
Light source unit for printable patterning VUV-Aligner Light source unit for printable patterning VUV-Aligner The world's first VUV lamp-type collimated light aligner The hydrophilic patterning technique using VUV irradiation achieves high-precision pattern formation that substantially reduces the number of processes compared to conventional lithography while providing finer pattern formation than that obtained with printing techniques. This paves the way for new applications such as organic transistors, wearable sensors and biochips. Th newly developed high-intensity collimated pulse light source system (patent pending) achieves 5/5* µm L/S (line/space) resolution. Contact us regarding availability for large surface areas. * Using resist TArF-P6111 from Tokyo Ohka Kogyo Co., Ltd. (film thickness: 260 nm)
Multipurpose exposure unit Deep UV Multilight Multipurpose exposure unit Deep UV Multilight The Deep UV Multi-light is a light source unit optimized for the deep UV wavelength region from 230 to 330 nm while maintaining the same basic structure of the Multi-light series that has a good track record as a uniform, collimated light source. It can be applied as a surface modification light source, as a light source for evaluation of various photochemical reactions, as well as for lithographic applications.
Super high-pressure UV lamps (500 W to 35 kW) Super high-pressure UV lamps (500W~35kW) Jointly developed with device manufacturers in response to their increasingly diverse needs, these lithographic UV lamps have earned high acclaim as well as user trust. From our broad lineup of 500 W to 35 kW class lamps, we can offer optimum irradiation solutions to bolster your productivity and improve yields. We can also develop lamps tailored to new devices developed by your company. The Operating Manual is Here (requires member registration)
Flash lamp annealer Flash lamp annealer Flash lamp annealing allows very short heating processes as quick as one millisecond. UV to visible wavelength light emitted from the flash lamp can concentrate heat on a substrate (material) surface so that the thermal influence on the underlying film or substrate can be extremely small compared with conventional heat sources. This millisecond surface heat treatment is becoming an essential technology for future device developments such as zero diffusion of semiconductor implanted layers and thermal budget reduction. Flash lamp heating is also used to produce reactions such as crystallization, bonding, peeling, decomposition and curing. These characteristics are effectively applied in various research and development applications such as Si wafers, SiC wafers, glass, plastic films and other flexible substrates, as well as in production (manufacturing) line applications. We welcome requests for experimental demonstrations. Please feel free to contact us.
UV-LED uniform line illumination light source UniLine UV-LED uniform line illumination light source UniLine - Supporting multiple wavelengths, this production line light source is capable of high-intensity, highly uniform UV irradiation. - The proprietary optical design supports various irradiation distances from 10 to 150 mm. - Irradiation length can be customized according to workpiece size and application.
UV-LED uniform surface illumination light source UniField UV-LED uniform surface illumination light source UniField - This UV LED irradiation unit is available with a selection of multiple wavelengths for large-area, high-intensity and highly uniform irradiation. - Ushio's proprietary installed lens minimizes the illuminance loss due to increased irradiation distance. Proper irradiation is possible without fine adjustment for workpieces having varying thickness. - Our lineup includes 100, 150, and 200 standard sizes ・Multiple mixed wavelength type designs are also available.
UV Irradiance Meter UIT-201 UV irradiance meter UIT-201 The Unimeter series was developed based on our experience and expertise as a manufacturer of optical equipment. These compact optical measuring instruments are genuinely easy-to-use from the user's standpoint. These compact UV meters are used to manage the intensity of a range of instruments, including irradiation systems, as well as UV curing, cleansing and sterilizing systems. ■ Troubleshooting is Here (requires member registration)
Accumulated UV Meter UIT-250 Accumulated UV meter UIT-250 The Unimeter series was developed based on our experience and expertise as a manufacturer of optical equipment. These compact optical measuring instruments are genuinely easy-to-use from the user's standpoint. These compact UV meters are used to manage the intensity of a range of instruments, including irradiation systems, as well as UV curing, cleansing and sterilizing systems. ■ Troubleshooting is Here (requires member registration)
Super-thin palm top UV Irradiance Meter UIT-θLED Super-thin palm top UV irradiance meter UIT-θLED This wireless LED-dedicated irradiance meter is only 4.9 mm thick. Measures optical film coatings, adhesion of precision optical parts and lenses, and UV printing processes between light source and object even in hard-to-reach locations. ■ Operating Manual and Troubleshooting are Here (requires member registration)
Spectro-Radiometer USR-45 Series Spectral radiometer USR-45 Series Ushio's irradiance meters can measure absolute values based on the photometric standard lamp established by the National Institute of Advanced Industrial Science and Technology. Measures a broad range of bands including UV, visible and infrared light, and various light sources such as steady, flashing and LED lights ■ Operating Manual and Troubleshooting are Here (requires member registration)
Plastic injection-molding machines Plastic injection-molding machines

The high-powered and highly responsive features of the equipment have advanced to offer a variety of high-precision, highly stable injection-molding machines that can be used for a variety of shapes. Moreover, by proposing combinations of peripheral equipment required in the molding process, we have established our place as a provider for total solutions.
*This is The USHIOLIGHTING, INC's product.

Mold protection system Mold protection system

This device monitors plastic and die-cast molding machines to prevent mold damage by detecting the presence of residue when products are dropped from the mold, and employs a re-protrusion function so the molding machine can recover automatically, or halt.
Requiring very little monitoring time, damage to expensive molds used in plastic molding and die-casting machines is prevented, loss of facility operating time is avoided, and the total cost of manufacture is reduced.
*This is The USHIOLIGHTING, INC's product.

Joints and tubing Joints and tubing

We offer tubes (UP tubes) and joints (Z unions) for device and machinery piping.
Suitable for a broad range of genres such as semiconductor and LCD manufacturing equipment, physics, chemistry and medical equipment, measuring instruments and food sector machinery, our piping features clean, slim and lightweight characteristics that enable easy, quick, safe and secure plumbing.
*This is The USHIOLIGHTING, INC's product.

Plastic materials Plastic materials

We offer general-purpose and engineered plastics, high-performance injection-molding materials, plates, sheets and round bars of special-purpose plastics and eco-materials that incorporate recycled paper.
Also available in our lineup are colorants and detergents to satisfy various manufacturing needs.
*This is The USHIOLIGHTING, INC's product.

22 results found. Displaying results1-21
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