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Product name Product description Main applications and fields Wavelength
Excimer Lighting Power Supply Modules These are power supply modules for barrier discharge lamps. High efficiency is realized by adopting our own pulse lighting method instead of a sine wave. Compact, highly reliable transformers realize stable high voltage. Technology Introduction Page For more details about this technology, please inquire at this page Inquiry Form
Atmospheric-Pressure Plasma Power Supply Modules These power supply modules are ideal for generating atmospheric pressure plasma. They are customizable for various plasma heads. Moreover, they can be parallel-connected to handle higher power levels. Technology Introduction Page For more details about this technology, please inquire at this page Inquiry Form
LED Module Lighting Devices These lighting devices for LD/LED are system products that integrate the control system and LED drivers. Control lighting operation of bulk connected LD/LEDs. Technology Introduction Page For more details about this technology, please inquire at this page Inquiry Form
Single-Output LED Drivers These single-output LED drivers were developed mainly for UV curing (printing, semiconductor photolithography, and etc.). Technology Introduction Page For more details about this technology, please inquire at this page Inquiry Form
Multi-Output LED Driver With a total of 15 output channels assignable in up to three groups, this multi-output LED driver can control lighting and dimming of each group. For example, it is possible to individually control the UV-LEDs for each g-, h-, and i-line to cure ink for printing, so that each lights under optimal mix conditions. Technology Introduction Page For more details about this technology, please inquire at this page Inquiry Form
Long-Arc Flash Lamp Lighting Power Supply This power supply charges ultra-high-voltage capacitors for long-arc momentary-output flash lamps. Ideal for chargers in flash lamp annealing (FLA) equipment. Technology Introduction Page For more details about this technology, please inquire at this page Inquiry Form
Short-Arc Flash Lamp Lighting Power Supply This power supply charges ultra-high-voltage capacitors for short-arc momentary-output flash lamps. Ideally suited for powering the light source for the new type VUV patterning exposure machines. Technology Introduction Page For more details about this technology, please inquire at this page Inquiry Form
Power Supply Repair Services Various power supplies are accepted for repairs. We have repair facilities in China, Korea and Taiwan, enabling local repairs without requiring power supplies to be returned to Japan when problems occur. Please feel free to consult us during maintenance and repair. Technology Introduction Page For more details about this technology, please inquire at this page Inquiry Form
Large field stepper UX-5 Series UX-7 Series Large field stepper UX-5 Series UX-7 Series

Ushio provides specialized steppers for cutting-edge packaging applications employed in servers and PCs, and in portable devices such as smart phones and tablet PCs. The stepper is intended for package substrates using a stage corresponding to the panel size and Ushio's proprietary large-area projection lens technology cultivated from many years of expertise in light source and optical technology. High productivity is achieved while realizing the high resolution and overlay accuracy required for the latest packaging substrates.

【Component Technology】
- Includes the world's best-selling super high-pressure UV lamp
- Ushio's irradiation optical system boasts a high degree of uniformity
- Unrivaled large-area projector lens

Full-field projection aligner UX-4 Series Full field projection aligner UX-4 Series

This projection aligner uses our unique large area projector lens technology, light source and other optical technologies developed by Ushio over many years. Provides one-shot exposure of up to 8-inch wafers without touching the mask. Large depth of field enables proper exposure of non-flat wafers, achieving higher productivity and yield not possible with a proximity aligner.

【Component Technology】
- Includes the world's number one super high-pressure UV lamp
- Our own irradiation optical system boasting a high degree of uniformity
- Unrivaled large-area projector lens

Contact/proximity aligners UX-3 Series Contact/proximity aligners UX-3 Series

This mask aligner uses light source and optical technologies developed by Ushio over many years. This exposure device supports not only ihg rays, but the deep UV range as well.

【Component Technology】
- Includes the world's number one super high-pressure UV lamp
- Our own irradiation optical system boasting a high degree of uniformity

Manual type contact/proximity aligners UX-1 Series Manual type contact/proximity aligners UX-1 Series

This mask aligner uses light source and optical technologies developed by Ushio over many years. This exposure device supports not only ihg rays, but the deep UV range as well.

【Component Technology】
- Includes the world's number one super high-pressure UV lamp
- Our own irradiation optical system boasting a high degree of uniformity

Roll-to-roll lithography tool UFX Series Roll to roll lithography tool UFX Series

Currently Ushio's proximity/projection exposure systems for flexible substrates have a track record of over 800 units. Highly efficient high-resolution exposure is achieved by a projector lens that makes full use of our specially developed high-output lamp and our established reputation in optical system technology.

【Component Technology】
- Includes the world's number one super high-pressure UV lamp
- Our own irradiation optical system boasting a high degree of uniformity
- Unrivaled large-area projector lens

EUV light source (for photo mask inspection and various technologies development) EUV light source (for photo mask inspection and various technologies development) The semiconductor industry's continuous advance toward higher performance, smaller size and lower power consumption has spurred the development of ultra-miniaturized exposure technology. EUV (extreme ultraviolet) exposure technology at 13.5 nm wavelength is one of the most promising next-generation technologies. USHIO is conducting EUV light source development for photo mask inspection and for various other technical applications utilizing our experience in the study and development of our EUV Xe DPP and EUV Sn LDP light source technologies.
Excimer lamps/Excimer irradiation unit Excimer lamps/Excimer irradiation unit Excimer VUV light is the very high-energy light generated by lamps containing noble gases or noble-gas hydride compounds. Externally applying high-energy electrons to a sealed lamp containing a noble gas or noble gas hydride compound generates intense plasma discharge (dielectric barrier discharge). This plasma features high-energy electron content, and can be extinguished instantly. The plasma discharge instantly excites the atoms of the discharge gas (noble gas) to their excimer (Xe) state (high-energy orbital atoms form excimer excited molecules). The excimer-specific spectrum is emitted when atoms return from this excimer state to their original condition (ground state). This emission is called VUV light.
Light source unit for printable patterning VUV-Aligner Light source unit for printable patterning VUV-Aligner The world's first VUV lamp-type collimated light aligner The hydrophilic patterning technique using VUV irradiation achieves high-precision pattern formation that substantially reduces the number of processes compared to conventional lithography while providing finer pattern formation than that obtained with printing techniques. This paves the way for new applications such as organic transistors, wearable sensors and biochips. Th newly developed high-intensity collimated pulse light source system (patent pending) achieves 5/5* µm L/S (line/space) resolution. Contact us regarding availability for large surface areas. * Using resist TArF-P6111 from Tokyo Ohka Kogyo Co., Ltd. (film thickness: 260 nm)
UV photoresist curing systems Unihard® UV photoresist curing systems Unihard This ultraviolet irradiation device is used for photoresist curing in LSI manufacturing lines. Equipped with a super high-pressure UV lamp and an excimer lamp, this system is used for various applications such as enhancing plasma resistance during dry etching, photoresist outgassing and burn prevention during ion implantation, neutralizing electrical charge, removing stress and low-k curing.
Charge neutralization systems Charge neutralization systems Strong, deep ultraviolet irradiation neutralizes electric charge on EPROM and Flash memory. Neutralizes electric charge that can be problematic for plasma processing.
UV instant curing equipment Unicure® System UV instant curing equipment Unicure System High-power, compact UV curing and drying equipment achieves low-temperature processing. Lamps and other components can be selected according to the UV intensity and irradiation area required for the intended purpose. Instruction manuals here (Registration required)
LED spot UV irradiation unit SPL-2 LED spot UV irradiation unit SPL-2 This spot cure series LED type has over 30 years of actual results. By taking advantage of our optical technology developed up to now, we provide solutions to problems that could not be solved with conventional LED types. We propose products tailored to your needs.
Spot UV irradiation units Spot Cure® Series Spot UV irradiation units Spot Cure Series The "Spot Cure Series" takes advantage of our light system technology cultivated for over 30 years, in pursuit of ease of use and environmental considerations. We offer a wide variety of lens and unit options to suit line and workpiece conditions.
38 results found. Displaying results1-21
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