AHAPS-SAM patterning

  • Modification
  • Litho-Patterning
  • Liquid Crystal Display
  • Optics
  • Biology and Chemistry
  • Automotive and Marine
  • MEMS, Electronic Components
  • Printed Circuit Board and PKG
  • Printing
  • Semiconductors

Visualization of the fluorescence dye (TAMRA) pattern following VUV irradiation of AHAPS-SAM through a photomask.* AHAPS: N-(6-aminohexyl)-aminopropyltrimethoxysilane

[Fluorescence image]
VUV irradiation, 2 minutes
N2 atmosphere
10nmSiO2 (thermal oxide film) / Si
Fluorescence dye TAMRA

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