Applied Physics Express

Fabrication of vertical AlGaN-based ultraviolet-B laser diodes using a laser lift-off method

 
Toma Nishibayashi1, Ryosuke Kondo1, Eri Matsubara1, Ryoya Yamada1, Yoshinori Imoto1, Koki Hattori1, Sho Iwayama1, Tetsuya Takeuchi1, Satoshi Kamiyama1, Hideto Miyake2,
Koichi Naniwae3,Kohei Miyoshi3, Akihiko Yamaguchi4, and Motoaki Iwaya1 
 
1Department of Materials Science and Engineering, Meijo University, Nagoya 468-8502, Japan
2Graduate School of Electrical and Electronic Engineering, Mie University, Tsu 514-8507, Japan
3Ushio, Inc., Gotenba 412-0038, Japan
4Seishin Trading Co. Ltd., Kobe 650-0047, Japan

 
In recent years, reports on UV -LDs have been published one after another. Considering the application field of UV semiconductor light-emitting devices, it is essential to achieve high output, high current density operation, and it is important to establish a fabrication process for vertical devices to realize these.  In this letter, we investigated the realization of an AlGaN-based vertical UV-B LD using the LLO method. As a result, at a current density of 25kA cm‒2, the emission changes to an extremely sharp emission with a peak wavelength of 298.1 nm and a FWHM of less than 1 nm, which is characteristic of stimulated emission.


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