Surface Modification of Cyclo Olefin Polymer Film for Electronic Packaging by Vacuum Ultraviolet Irradiation

Taro Arimoto, Masaki Miura, and Fumitoshi Takemoto 
Ushio Inc., 1194, Sazuchi, Bessho-cho, Himeji, Hyogo 671-0224, Japan 
tr.arimoto@ushio.co.jp 

Vacuum ultraviolet (VUV, λ = 172 nm) excimer radiation is capable of hydrophilizing polymer surfaces and removing contaminants. This method enhances the adhesion between the treated surface and a coating without relying on the conventional anchor effect. In this study, we examined the surface modification of cyclo olefin polymer films using VUV light and evaluated its impact on adhesion strength. Under appropriate conditions, VUV pre-treatment significantly improves the adhesion strength between electroless-deposited copper and the cyclo olefin polymer substrate. Additionally, we investigated the adhesion mechanism of electroless plating on surface reformed resin through VUV irradiation using a scanning transmission electron microscope. 



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