IEEE Journal of the Electron Devices Society
Energy-Efficient Annealing Process of Ferroelectric Hf0.5Zr0.5O2 Capacitor Using Ultraviolet-LED for Green Manufacturing
HIROTAKA YAMADA 1,3, SATORU FURUE2, TAKEHIKO YOKOMORI2 (Member, IEEE), YUKI ITOYA3,
TAKUYA SARAYA3 (Member, IEEE), TOSHIRO HIRAMOTO 3 (Member, IEEE),
AND MASAHARU KOBAYASHI 3,4 (Senior Member, IEEE)
1 Industrial Process Department, Marketing Division, Ushio Inc., Himeji 671-0224, Japan
2 Technology & Engineering Department, Photon Global Business Unit, Ushio Inc., Himeji 671-0224, Japan
3 Institute of Industrial Science, The University of Tokyo, Tokyo 113-8654, Japan
4 System Design Lab, The University of Tokyo, Tokyo 113-8654, Japan
CORRESPONDING AUTHOR: H. YAMADA
TAKUYA SARAYA3 (Member, IEEE), TOSHIRO HIRAMOTO 3 (Member, IEEE),
AND MASAHARU KOBAYASHI 3,4 (Senior Member, IEEE)
1 Industrial Process Department, Marketing Division, Ushio Inc., Himeji 671-0224, Japan
2 Technology & Engineering Department, Photon Global Business Unit, Ushio Inc., Himeji 671-0224, Japan
3 Institute of Industrial Science, The University of Tokyo, Tokyo 113-8654, Japan
4 System Design Lab, The University of Tokyo, Tokyo 113-8654, Japan
CORRESPONDING AUTHOR: H. YAMADA
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