USHIO to Consolidate EUV Business into a Single Unit in Japan and Continue its Business for Inspection and Development Applications


Transferring its maintenance business to ASML

USHIO INC. (Headquarters: Tokyo, Japan; President and Chief Executive Officer: Shiro Sugata; hereinafter "USHIO") today announced that it will close down the activities of XTREME technologies GmbH (Headquarters: Germany; President: Tatsushi Igarashi, hereinafter “XTREME”), a research and development company for Extreme Ultraviolet (EUV) light sources for next-generation semiconductor lithography, and consolidate the EUV light source business into a single unit in Japan and continue it for inspection and development applications in the future.

With this, the maintenance services for XTREME EUV light sources that were provided for ASML Netherlands B.V., a subsidiary of Netherland-based ASML Holding N.V., is transferred to ASML on May 9, local time.

The impact of this decision on our financial results has been already reflected in the final results for the term ended in March 2013.


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