Guide to Joint Experiments and Demonstrator Devices

Light Collaboration
Ushio provides joint experimental systems/spaces for joint experiments and development and for customers who are considering purchase. We are happy to discuss joint research and experiments, submission of samples for testing, or load of test devices.

* For details, please inquire using the inquiry submission form or by telephone.
* Note that we may not be able to accommodate all requests depending on the type of experiment or purpose or application intended for test equipment.

Joint Experiments

  • Large field stepper UX-5 Series UX-7 Series

    Large field stepper UX-5 Series UX-7 Series

    Ushio provides specialized steppers for cutting-edge packaging applications employed in servers and PCs, and in portable devices such as smart phones and tablet PCs. The stepper is intended for package substrates using a stage corresponding to the panel size and Ushio's proprietary large-area projection lens technology cultivated from many years of expertise in light source and optical technology. High productivity is achieved while realizing the high resolution and overlay accuracy required for the latest packaging substrates.

    【Component Technology】
    - Includes the world's best-selling super high-pressure UV lamp
    - Ushio's irradiation optical system boasts a high degree of uniformity
    - Unrivaled large-area projector lens

  • Full field projection aligner UX-4 Series

    Full-field projection aligner UX-4 Series

    This projection aligner uses our unique large area projector lens technology, light source and other optical technologies developed by Ushio over many years. Provides one-shot exposure of up to 8-inch wafers without touching the mask. Large depth of field enables proper exposure of non-flat wafers, achieving higher productivity and yield not possible with a proximity aligner.

    【Component Technology】
    - Includes the world's number one super high-pressure UV lamp
    - Our own irradiation optical system boasting a high degree of uniformity
    - Unrivaled large-area projector lens

  • Contact/proximity aligners UX-3 Series

    Contact/proximity aligners UX-3 Series

    This mask aligner uses light source and optical technologies developed by Ushio over many years. This exposure device supports not only ihg rays, but the deep UV range as well.

    【Component Technology】
    - Includes the world's number one super high-pressure UV lamp
    - Our own irradiation optical system boasting a high degree of uniformity

  • Manual type contact/proximity aligners UX-1 Series

    Manual type contact/proximity aligners UX-1 Series

    This mask aligner uses light source and optical technologies developed by Ushio over many years. This exposure device supports not only ihg rays, but the deep UV range as well.

    【Component Technology】
    - Includes the world's number one super high-pressure UV lamp
    - Our own irradiation optical system boasting a high degree of uniformity

  • Roll to roll lithography tool UFX Series

    Roll-to-roll lithography tool UFX Series

    Currently Ushio's proximity/projection exposure systems for flexible substrates have a track record of over 800 units. Highly efficient high-resolution exposure is achieved by a projector lens that makes full use of our specially developed high-output lamp and our established reputation in optical system technology.

    【Component Technology】
    - Includes the world's number one super high-pressure UV lamp
    - Our own irradiation optical system boasting a high degree of uniformity
    - Unrivaled large-area projector lens

  • Excimer lamps/Excimer irradiation unit

    Excimer lamps/Excimer irradiation unit

    Excimer VUV light is the very high-energy light generated by lamps containing noble gases or noble-gas hydride compounds. Externally applying high-energy electrons to a sealed lamp containing a noble gas or noble gas hydride compound generates intense plasma discharge (dielectric barrier discharge). This plasma features high-energy electron content, and can be extinguished instantly. The plasma discharge instantly excites the atoms of the discharge gas (noble gas) to their excimer (Xe) state (high-energy orbital atoms form excimer excited molecules). The excimer-specific spectrum is emitted when atoms return from this excimer state to their original condition (ground state). This emission is called VUV light.

  • Light source unit for printable patterning VUV-Aligner

    Light source unit for printable patterning VUV-Aligner

    The world's first VUV lamp-type collimated light aligner The hydrophilic patterning technique using VUV irradiation achieves high-precision pattern formation that substantially reduces the number of processes compared to conventional lithography while providing finer pattern formation than that obtained with printing techniques. This paves the way for new applications such as organic transistors, wearable sensors and biochips. Th newly developed high-intensity collimated pulse light source system (patent pending) achieves 5/5* µm L/S (line/space) resolution. Contact us regarding availability for large surface areas. * Using resist TArF-P6111 from Tokyo Ohka Kogyo Co., Ltd. (film thickness: 260 nm)

  • UV photoresist curing systems Unihard

    UV photoresist curing systems Unihard®

    This ultraviolet irradiation device is used for photoresist curing in LSI manufacturing lines. Equipped with a super high-pressure UV lamp and an excimer lamp, this system is used for various applications such as enhancing plasma resistance during dry etching, photoresist outgassing and burn prevention during ion implantation, neutralizing electrical charge, removing stress and low-k curing.

  • Charge neutralization systems

    Charge neutralization systems

    Strong, deep ultraviolet irradiation neutralizes electric charge on EPROM and Flash memory. Neutralizes electric charge that can be problematic for plasma processing.

  • UV instant curing equipment Unicure System

    UV instant curing equipment Unicure® System

    High-power, compact UV curing and drying equipment achieves low-temperature processing. Lamps and other components can be selected according to the UV intensity and irradiation area required for the intended purpose. Instruction manuals here (Registration required)

  • LED spot UV irradiation unit SPL-2

    LED spot UV irradiation unit SPL-2

    This spot cure series LED type has over 30 years of actual results. By taking advantage of our optical technology developed up to now, we provide solutions to problems that could not be solved with conventional LED types. We propose products tailored to your needs.

  • Spot UV irradiation units Spot Cure Series

    Spot UV irradiation units Spot Cure® Series

    The "Spot Cure Series" takes advantage of our light system technology cultivated for over 30 years, in pursuit of ease of use and environmental considerations. We offer a wide variety of lens and unit options to suit line and workpiece conditions.

  • Multipurpose exposure unit Deep UV Multilight

    Multipurpose exposure unit Deep UV Multilight

    The Deep UV Multi-light is a light source unit optimized for the deep UV wavelength region from 230 to 330 nm while maintaining the same basic structure of the Multi-light series that has a good track record as a uniform, collimated light source. It can be applied as a surface modification light source, as a light source for evaluation of various photochemical reactions, as well as for lithographic applications.

  • Halogen lamp heaters

    Halogen lamp heaters

    These halogen lamp heaters were developed to efficiently extract the infrared light from the halogen lamp, with more than 85% of the input power converted into heat, resulting in a very efficient energy source. Heating by halogen lamp is rich in flexibility and controllability, with excellent characteristics no other heat source can provide. Ushio's heat processing systems are used in various industrial fields such as electronic device manufacturing processes like semiconductors and LCDs, and heating of auto parts and resin materials such as CFRP.

  • Flash lamp annealer

    Flash lamp annealer

    Flash lamp annealing allows very short heating processes as quick as one millisecond. UV to visible wavelength light emitted from the flash lamp can concentrate heat on a substrate (material) surface so that the thermal influence on the underlying film or substrate can be extremely small compared with conventional heat sources. This millisecond surface heat treatment is becoming an essential technology for future device developments such as zero diffusion of semiconductor implanted layers and thermal budget reduction. Flash lamp heating is also used to produce reactions such as crystallization, bonding, peeling, decomposition and curing. These characteristics are effectively applied in various research and development applications such as Si wafers, SiC wafers, glass, plastic films and other flexible substrates, as well as in production (manufacturing) line applications. We welcome requests for experimental demonstrations. Please feel free to contact us.

  • UV-LED uniform line illumination light source UniLine

    UV-LED uniform line illumination light source UniLine

    - Supporting multiple wavelengths, this production line light source is capable of high-intensity, highly uniform UV irradiation. - The proprietary optical design supports various irradiation distances from 10 to 150 mm. - Irradiation length can be customized according to workpiece size and application.

  • UV-LED uniform surface illumination light source UniField

    UV-LED uniform surface illumination light source UniField

    - This UV LED irradiation unit is available with a selection of multiple wavelengths for large-area, high-intensity and highly uniform irradiation. - Ushio's proprietary installed lens minimizes the illuminance loss due to increased irradiation distance. Proper irradiation is possible without fine adjustment for workpieces having varying thickness. - Our lineup includes 100, 150, and 200 standard sizes ・Multiple mixed wavelength type designs are also available.

  • UV-LED for printing Uni Jet Series

    UV-LED for printing Uni Jet Series

    Ushio's UniJet series consists of modular UV light sources that are optimally designed and developed to satisfy the stringent demands of UV curing and printing. This ideal light source technology has been sought as an alternative to conventional lamp-based UV light sources. Ushio's varied, custom designs, in the forms of the i, E and A-Series, were developed to fulfill functional requirements of the UV curing and printing industries and numerous commercial and industrial applications. These modules combine water-cooling, air-cooling and various dimming functions to ensure that each customer's specifications and needs are met.

  • Light-guide type line light sources for image processing

    Line light sources for image processing using light guides

    ・ Used in document copying machines,and and with a record of performance in scanners that makes this light source ideally suited for use in image processing applications and specialized illumination. ・ Can be provided with desired collimation by use of special prisms based on optical simulation in light guide. ・ Adaptable to any form depending on application, purpose or size. ・ Since all components, including the light guide, are produced internally, we can accommodate any sort of experiments or change in specifications. ・ In addition to visible light, irradiation using infrared or ultraviolet LEDs is possible.

  • UV irradiance meter UIT-201

    UV Irradiance Meter UIT-201

    The Unimeter series was developed based on our experience and expertise as a manufacturer of optical equipment. These compact optical measuring instruments are genuinely easy-to-use from the user's standpoint. These compact UV meters are used to manage the intensity of a range of instruments, including irradiation systems, as well as UV curing, cleansing and sterilizing systems. ■ Troubleshooting is Here (requires member registration)

  • Accumulated UV meter UIT-250

    Accumulated UV Meter UIT-250

    The Unimeter series was developed based on our experience and expertise as a manufacturer of optical equipment. These compact optical measuring instruments are genuinely easy-to-use from the user's standpoint. These compact UV meters are used to manage the intensity of a range of instruments, including irradiation systems, as well as UV curing, cleansing and sterilizing systems. ■ Troubleshooting is Here (requires member registration)

  • Super-thin palm top UV irradiance meter UIT-θ365

    Super-thin palm top UV Irradiance Meter UIT-θ365

    This wireless irradiance meter is only 4.9 mm thick. Measures optical film coatings, adhesion of precision optical parts and lenses, and UV printing processes between light source and object even in hard-to-reach locations. ■ Operating Manual and Troubleshooting are Here (requires member registration)

  • Super-thin palm top UV irradiance meter UIT-θLED

    Super-thin palm top UV Irradiance Meter UIT-θLED

    This wireless LED-dedicated irradiance meter is only 4.9 mm thick. Measures optical film coatings, adhesion of precision optical parts and lenses, and UV printing processes between light source and object even in hard-to-reach locations. ■ Operating Manual and Troubleshooting are Here (requires member registration)

  • Spectro-reflectance meter URE-50

    Spectro-Reflectance Meter URE-50

    Instantly measures spectral reflectance (from ultraviolet to near-infrared) of surfaces with up to ±R50 mm curvature as well as of flat surfaces. Despite their compact size, Ushio's unique measurement instruments support measurement of large products. ■ Operating Manual and Troubleshooting are Here (requires member registration)

  • Spectral radiometer USR-45 Series

    Spectro-Radiometer USR-45 Series

    Ushio's irradiance meters can measure absolute values based on the photometric standard lamp established by the National Institute of Advanced Industrial Science and Technology. Measures a broad range of bands including UV, visible and infrared light, and various light sources such as steady, flashing and LED lights ■ Operating Manual and Troubleshooting are Here (requires member registration)

Test Devices

  • Visible inspection light source 「230VILS」

    Making detailed inspection easier. A new light source unit with a lamp well suited to visual inspection.

    Catalog PDF(490KB)

  • Excimer lamps/Excimer irradiation unit

    Excimer lamps/Excimer irradiation unit

    Excimer VUV light is the very high-energy light generated by lamps containing noble gases or noble-gas hydride compounds. Externally applying high-energy electrons to a sealed lamp containing a noble gas or noble gas hydride compound generates intense plasma discharge (dielectric barrier discharge). This plasma features high-energy electron content, and can be extinguished instantly. The plasma discharge instantly excites the atoms of the discharge gas (noble gas) to their excimer (Xe) state (high-energy orbital atoms form excimer excited molecules). The excimer-specific spectrum is emitted when atoms return from this excimer state to their original condition (ground state). This emission is called VUV light.

  • Light source unit for printable patterning VUV-Aligner

    Light source unit for printable patterning VUV-Aligner

    The world's first VUV lamp-type collimated light aligner The hydrophilic patterning technique using VUV irradiation achieves high-precision pattern formation that substantially reduces the number of processes compared to conventional lithography while providing finer pattern formation than that obtained with printing techniques. This paves the way for new applications such as organic transistors, wearable sensors and biochips. Th newly developed high-intensity collimated pulse light source system (patent pending) achieves 5/5* µm L/S (line/space) resolution. Contact us regarding availability for large surface areas. * Using resist TArF-P6111 from Tokyo Ohka Kogyo Co., Ltd. (film thickness: 260 nm)

  • UV photoresist curing systems Unihard

    UV photoresist curing systems Unihard®

    This ultraviolet irradiation device is used for photoresist curing in LSI manufacturing lines. Equipped with a super high-pressure UV lamp and an excimer lamp, this system is used for various applications such as enhancing plasma resistance during dry etching, photoresist outgassing and burn prevention during ion implantation, neutralizing electrical charge, removing stress and low-k curing.

  • Charge neutralization systems

    Charge neutralization systems

    Strong, deep ultraviolet irradiation neutralizes electric charge on EPROM and Flash memory. Neutralizes electric charge that can be problematic for plasma processing.

  • UV instant curing equipment Unicure System

    UV instant curing equipment Unicure® System

    High-power, compact UV curing and drying equipment achieves low-temperature processing. Lamps and other components can be selected according to the UV intensity and irradiation area required for the intended purpose. Instruction manuals here (Registration required)

  • LED spot UV irradiation unit SPL-2

    LED spot UV irradiation unit SPL-2

    This spot cure series LED type has over 30 years of actual results. By taking advantage of our optical technology developed up to now, we provide solutions to problems that could not be solved with conventional LED types. We propose products tailored to your needs.

  • Spot UV irradiation units Spot Cure Series

    Spot UV irradiation units Spot Cure® Series

    The "Spot Cure Series" takes advantage of our light system technology cultivated for over 30 years, in pursuit of ease of use and environmental considerations. We offer a wide variety of lens and unit options to suit line and workpiece conditions.

  • Light source unit for scientific use Optical Modulex

    Light source unit for scientific use Optical Modulex

    This desktop light source unit provides simple collimated IR, UV and visible light, and is ideal for spectrometry and solar cell evaluation. All models have adjustment-free optical lamp axes for highly collimated, high-power light source experiments on the desktop.

  • Light source unit for inspection illumination Optical Modulex

    Light source unit for inspection illumination Optical Modulex

    Equipped with a high-intensity UV lamp, it provides high-precision collimated irradiation indispensable for inspection tasks. The desk-type light source unit has a track record of actual results for over 15 years as ideal for visual inspection of glass, film and lenses (and is the inspection light source recommended by the Glass Manufacturer's Association).

  • Multipurpose exposure unit Deep UV Multilight

    Multipurpose exposure unit Deep UV Multilight

    The Deep UV Multi-light is a light source unit optimized for the deep UV wavelength region from 230 to 330 nm while maintaining the same basic structure of the Multi-light series that has a good track record as a uniform, collimated light source. It can be applied as a surface modification light source, as a light source for evaluation of various photochemical reactions, as well as for lithographic applications.

  • Multipurpose exposure unit Multilight

    Multi-purpose exposure unit (Multilight)

    Used with contact/proximity aligners, “Multilight” in a number of variations. Recommended for applications that require fine patterning.

  • Halogen lamp heaters

    Halogen lamp heaters

    These halogen lamp heaters were developed to efficiently extract the infrared light from the halogen lamp, with more than 85% of the input power converted into heat, resulting in a very efficient energy source. Heating by halogen lamp is rich in flexibility and controllability, with excellent characteristics no other heat source can provide. Ushio's heat processing systems are used in various industrial fields such as electronic device manufacturing processes like semiconductors and LCDs, and heating of auto parts and resin materials such as CFRP.

  • UV-LED uniform line illumination light source UniLine

    UV-LED uniform line illumination light source UniLine

    - Supporting multiple wavelengths, this production line light source is capable of high-intensity, highly uniform UV irradiation. - The proprietary optical design supports various irradiation distances from 10 to 150 mm. - Irradiation length can be customized according to workpiece size and application.

  • UV-LED uniform surface illumination light source UniField

    UV-LED uniform surface illumination light source UniField

    - This UV LED irradiation unit is available with a selection of multiple wavelengths for large-area, high-intensity and highly uniform irradiation. - Ushio's proprietary installed lens minimizes the illuminance loss due to increased irradiation distance. Proper irradiation is possible without fine adjustment for workpieces having varying thickness. - Our lineup includes 100, 150, and 200 standard sizes ・Multiple mixed wavelength type designs are also available.

  • UV-LED for printing Uni Jet Series

    UV-LED for printing Uni Jet Series

    Ushio's UniJet series consists of modular UV light sources that are optimally designed and developed to satisfy the stringent demands of UV curing and printing. This ideal light source technology has been sought as an alternative to conventional lamp-based UV light sources. Ushio's varied, custom designs, in the forms of the i, E and A-Series, were developed to fulfill functional requirements of the UV curing and printing industries and numerous commercial and industrial applications. These modules combine water-cooling, air-cooling and various dimming functions to ensure that each customer's specifications and needs are met.

  • Light-guide type line light sources for image processing

    Line light sources for image processing using light guides

    ・ Used in document copying machines,and and with a record of performance in scanners that makes this light source ideally suited for use in image processing applications and specialized illumination. ・ Can be provided with desired collimation by use of special prisms based on optical simulation in light guide. ・ Adaptable to any form depending on application, purpose or size. ・ Since all components, including the light guide, are produced internally, we can accommodate any sort of experiments or change in specifications. ・ In addition to visible light, irradiation using infrared or ultraviolet LEDs is possible.

  • High power multi-color laser unit Novalum

    High power multi-color laser unit Novalum

    From a 400 μm diameter fiber core, packages provide 250 or 700 white balanced lumens from red, green and blue lasers with user-selectable UV and infrared wavelength regions output in a single package choice. In addition, the Necsel Intelligent Controller enables any color to be represented by adjusting color balance. Also equipped with temperature feedback and high-speed modulation, it's multi-functionality suits a wide range of applications and systems.

  • UV irradiance meter UIT-201

    UV Irradiance Meter UIT-201

    The Unimeter series was developed based on our experience and expertise as a manufacturer of optical equipment. These compact optical measuring instruments are genuinely easy-to-use from the user's standpoint. These compact UV meters are used to manage the intensity of a range of instruments, including irradiation systems, as well as UV curing, cleansing and sterilizing systems. ■ Troubleshooting is Here (requires member registration)

  • Accumulated UV meter UIT-250

    Accumulated UV Meter UIT-250

    The Unimeter series was developed based on our experience and expertise as a manufacturer of optical equipment. These compact optical measuring instruments are genuinely easy-to-use from the user's standpoint. These compact UV meters are used to manage the intensity of a range of instruments, including irradiation systems, as well as UV curing, cleansing and sterilizing systems. ■ Troubleshooting is Here (requires member registration)

  • Super-thin palm top UV irradiance meter UIT-θ365

    Super-thin palm top UV Irradiance Meter UIT-θ365

    This wireless irradiance meter is only 4.9 mm thick. Measures optical film coatings, adhesion of precision optical parts and lenses, and UV printing processes between light source and object even in hard-to-reach locations. ■ Operating Manual and Troubleshooting are Here (requires member registration)

  • Super-thin palm top UV irradiance meter UIT-θLED

    Super-thin palm top UV Irradiance Meter UIT-θLED

    This wireless LED-dedicated irradiance meter is only 4.9 mm thick. Measures optical film coatings, adhesion of precision optical parts and lenses, and UV printing processes between light source and object even in hard-to-reach locations. ■ Operating Manual and Troubleshooting are Here (requires member registration)

  • Spectro-reflectance meter URE-50

    Spectro-Reflectance Meter URE-50

    Instantly measures spectral reflectance (from ultraviolet to near-infrared) of surfaces with up to ±R50 mm curvature as well as of flat surfaces. Despite their compact size, Ushio's unique measurement instruments support measurement of large products. ■ Operating Manual and Troubleshooting are Here (requires member registration)

  • Spectral radiometer USR-45 Series

    Spectro-Radiometer USR-45 Series

    Ushio's irradiance meters can measure absolute values based on the photometric standard lamp established by the National Institute of Advanced Industrial Science and Technology. Measures a broad range of bands including UV, visible and infrared light, and various light sources such as steady, flashing and LED lights ■ Operating Manual and Troubleshooting are Here (requires member registration)