Directors（As of June 29, 2021）

Directors	President and Chief Executive Officer 　　　　　Koji Naito Representative Director 　　　　　Naoki Kawamura Director 　　　　　Kazuhisa Kamiyama Director 　　　　　Takabumi Asahi Outside Director 　　　　　Yoshinari Hara Outside Director 　　　　　Yasufumi Kanemaru Outside Director 　　　　　Sakie T. Fukushima Outside Director 　　　　　Toyonari Sasaki Director and Audit & Supervisory Committee Member 　　　　　Nobuyuki Kobayashi Outside Director and Audit & Supervisory Committee Member 　 Rei Sugihara Outside Director and Audit & Supervisory Committee Member 　 Akemi Sunaga

Directors

Executive officers（As of April 1, 2021）

Chief Executive Officer	Koji Naito
Senior Managing Executive Officer	Naoki Kawamura	General Manager, Business Management Headquarters, General Manager, System Solution Division, and General Manager, Incubation Center
Managing Executive Officer	Tetsuo Nakano	Deputy General Manager, Business Management Headquarters and General Manager, Light Source Business Division
Senior Executive Officers	Takabumi Asahi	General Manager, Corporate Headquarters
Senior Executive Officers	Nobuhiro Inosako	General Manager, EUV Business Unit , System Solution Division
Executive Officers	Masato Jikihara	General Manager, Customer Service Center, System Solution Division
	Hiroki Kodaka	General Manager, R&D Division
	Masato Kawamoto	Deputy General Manager, Light Source Business Division