Directors(As of June 29, 2021)

Directors
President and Chief Executive Officer
     Koji Naito
Representative Director
     Naoki Kawamura
Director
     Kazuhisa Kamiyama
Director
     Takabumi Asahi
Outside Director
     Yoshinari Hara
Outside Director
     Yasufumi Kanemaru
Outside Director
     Sakie T. Fukushima
Outside Director
     Toyonari Sasaki
Director and Audit & Supervisory Committee Member
     Nobuyuki Kobayashi
Outside Director and Audit & Supervisory Committee Member
  Rei Sugihara
Outside Director and Audit & Supervisory Committee Member
  Akemi Sunaga
 

Executive officers(As of April 1, 2021)

Chief Executive Officer

Koji Naito

Senior Managing Executive Officer Naoki Kawamura General Manager, Business Management Headquarters,
General Manager, System Solution Division, and
General Manager, Incubation Center
Managing Executive Officer Tetsuo Nakano Deputy General Manager, Business Management Headquarters and
General Manager, Light Source Business Division
Senior Executive Officers Takabumi Asahi General Manager, Corporate Headquarters
Nobuhiro Inosako General Manager, EUV Business Unit , System Solution Division 
Executive Officers Masato Jikihara General Manager, Customer Service Center, System Solution Division 
Hiroki Kodaka General Manager, R&D Division
Masato Kawamoto Deputy General Manager, Light Source Business Division