Ushio signed the partnership agreement to co-develop EUV

Ushio, Philips and Jenoptik LOS Signed an LOI to Form a Partnership to Co-develop EUV Sources for Next Generation Semiconductor Lithography

October 30, 2007 - Ushio Inc, Philips and JENOPTIK Laser, Optik, Systeme GmbH announce that they signed an LOI to form a partnership to co-develop EUV (Extreme Ultra Violet) sources, a cutting-edge technology for photolithography of new generation semiconductors.

Together XTREME technologies GmbH (a company in which Ushio and JENOPTIK Laser, Optik, Systeme GmbH each hold a 50% share) and Philips Extreme UV GmbH (a 100% subsidiary of Philips) have developed and shipped EUV sources based on the gas discharge technology principle. They have shipped experimental tools so far and based on this experience, XTREME and Philips delivered alpha tools to leading customers during 2006 and 2007; these tools are mounted on full-field scanners, which can expose 300 mm wafers.

The objectives of the partnership are to speed up the development of EUV lithography and make it practical as the post-ArF laser immersion technology. The speed of introduction depends crucially on the development of high-power light sources. The partnership between XTREME and Philips　EUV, which are the only companies world-wide with experience of shipment of commercial EUV sources for exposure tools, will accelerate the speed of development of beta tools and ultimately secure the development and sales of commercial EUV sources.

Ushio, established in 1964, is a foremost manufacture of lamps for lighting, office automation, projectors as well as semiconductor/LCD manufacturing processes. It also manufactures the optical equipment in which those lamps are equipped. The Tokyo-based company operates not only in Japan, but also in North America, Asia and Europe with over 4,700 employees for both sales/marketing and productions. The well tied-up relation with the customers enables it to have a high market share in various fields. The consolidate sales in the fiscal year ended March 2007, reached to 151 billion yen （US$1.2 bil）. For further information: http://www.usho.co.jp/en/

Royal Philips Electronics of the Netherlands (NYSE: PHG, AEX: PHI) is a global leader in healthcare, lighting and consumer lifestyle, delivering products, services and solutions through the brand promise of "sense and simplicity". Headquartered in the Netherlands, Philips employs approximately 128,100 employees in more than 60 countries worldwide. With sales of EUR 27 billion in 2006, the company is a market leader in medical diagnostic imaging and patient monitoring systems, energy efficient lighting solutions, personal care and home appliances, as well as consumer electronics. News from Philips is located at www.philips.com/newscenter.

JENOPTIK Laser, Optik, Systeme GmbH is a fully-owned subsidiary of the JENOPTIK AG technology group of Jena, Germany. The company’s business units Lasers, Optics, Microoptics and Sensors develop, produce and distribute laser sources, optical and micro-optical components, modules and system solutions as well as the technologies used in the precise measurement, imaging, structuring and analysis of a variety of materials. The company’s success is anchored in its use of the latest in technology and its custom-designed applications.

JENOPTIK Laser, Optik, Systeme GmbH was founded in 1995, currently has about 580 employees and is part of the Laser & Optics division of the Jenoptik group. Further information on: www.jenoptik-los.com