Notice of Increasing the Production Capacity for Lithography Equipment

USHIO INC. (Head office: Tokyo, President and CEO: Koji Naito) hereby announces that we have decided to make a capital investment to increase the production capacity for UX-5 series large field steppers and UFX series roll to roll lithography tools (hereinafter “lithography equipment”) in order to cope with a new increase in demand for the most-advanced IC package substrates and flexible substrates.

The future development of IoT is expected to increase the demand for servers for data centers that enable high-capacity and high-speed data processing. Meanwhile, in the area of displays such as those of smartphones, the growing use of OLED displays and narrower bezels is increasing the demand for flexible substrates known as COF substrates.

In the both cases, the IC substrates are required to adopt high resolution and overlay accuracy production process.
We will contribute to creating an affluent society realized through the development of IoT by increasing the production of lithography equipment that meets such requirements with high productivity.


Capital Investment Plan Overview
(1) Investment details: Deployment of equipment for manufacturing the lithography equipment and expansion of production space
(2) Installation location: Gotemba Division (Gotemba City, Shizuoka Prefecture)
(3) Production increase plan: The production capacity expansion has already started, which will be doubled till the second half of 2019.