Projection Lithography Technology

Ushio's Projection Lithography Technology
Total solutions ranging from light sources to optics and from transport technology

Ushio's full field projection lithography tools use specially developed high-output lamps together with projection lithography to prevent mask damage and enables reduced mask patterns along with build-up and high resolution stacking of multi-layer patterns.
We introduce Ushio's element technology for large area projection lithography suitable with all sorts of substrates, such as glass boards, ceramic boards, roll boards, and printed circuit boards (PCBs).