Notice of Increasing the Production Capacity for Lithography Equipment

Ushio Inc. (Head office: Tokyo, President and CEO: Koji Naito, hereinafter “Ushio”) hereby announces that it has decided to make a capital investment to increase the production capacity for its UX-5 series large field steppers (hereinafter “lithography equipment”) to meet a further increase in demand for cutting-edge IC package substrates. 

This is an ongoing investment since 2019. In step with the progress of IoT, demand for servers for data centers that enable high-capacity, high-speed data processing has exceeded our expectations, and has created increasing needs for IC package substrates, which requires high resolution and overlay accuracy production processes. Consequently, we have decided that it is necessary to invest in further expanding the production of lithography equipment for these substrates. 

Ushio will continue to contribute to realizing comfortable and convenient societies through the development of IoT, leveraging its light technology. 

Capital Investment Plan Overview
(1) Investment details: Expansion of the production space for lithography equipment for cutting-edge IC package substrates (within the Gotemba Division)
(2) Total investment: 1.5 billion yen (planned)
(3) Location: Gotemba Division (Gotemba City, Shizuoka Prefecture)
(4) Production capacity: Increasing to about 1.3 times existing production capacity
(5) Schedule: Changing layout and starting to increase the production capacity of manufacturing facility in the first half of FY2021
       Starting production during the first half of FY2022 with 1.3 times existing production capacity


 

                            Gotemba Division                                                     Large field stepper "UX-5 Series"

Reference
Announcement on May 9, 2019: “Notice of Increasing the Production Capacity for Lithography Equipment”

https://www.ushio.co.jp/en/news/1001/2019-2019/500442.html

 

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