IMEC Announces Printing of the First Extreme Ultra Violet (EUV)-Light Wafers with ASML NXE:3100 Mounted with XTREME’s Laser-Assisted Discharge Plasma (LDP) Source. For Details, Visit Imec News.

IMEC announces printing of the first Extreme Ultra Violet (EUV)-light wafers with ASML NXE:3100 mounted with XTREME’s laser-assisted discharge plasma (LDP) source. For details, visit Imec News.

For detailed information, please refer to IMEC Website

• XTREME technologies GmbH Product Positioning　 （PDF：140KB）
• Rationale of Laser-assisted Discharge Plasma (LDP) Technology　 （PDF：2.54MB）