News list

Product and technology

• 2011.12.05

  USHIO Introduces Three Lithography-System Models
  for Power Devices, MEMS, and 3D LSI Devices

• 2011.10.27

  USHIO Group Company's EUV Light Source Achieves Output of 30 W at Intermediate Focus

• 2011.09.05

  USHIO Announces Debut of World's First
  200-mm Wafer Full-Field Projection Lithography System "UX4-3Di FFPL 200"
  for High-Volume Manufacturing of 3D LSI Devices

• 2011.07.12

  USHIO Announces Debut of Two New UX4-LEDs Series Models at SEMICON WEST 2011

• 2011.07.12

  IMEC Announces Printing of the First Extreme Ultra Violet (EUV)-Light Wafers with ASML NXE:3100 Mounted with XTREME’s Laser-Assisted Discharge Plasma (LDP) Source. For Details, Visit Imec News.

• 2011.03.04

  European Research Institute to Start Bringing in EUV Light Source Produced by USHIO

• 2011.02.22

  Ushio Inc. Reaches Agreement with Shochiku and Warner Mycal, to Introduce Promotion Program of Screen Digitalization

• 2011.01.23

  USHIO Begins Marketing Nano-Imprint VUV Ashing System “CHiPs”

• 2011.01.20

  USHIO Commences Sales of LED Modules for Office Automation Equipment for Reading Documents