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“Cleaning and Modification System“ search result
Main applications and fields
Excimer lamps/Excimer irradiation unit
Excimer VUV light is the very high-energy light generated by lamps containing noble gases or noble-gas hydride compounds.
Externally applying high-energy electrons to a sealed lamp containing a noble gas or noble gas hydride compound generates intense plasma discharge (dielectric barrier discharge). This plasma features high-energy electron content, and can be extinguished instantly. The plasma discharge instantly excites the atoms of the discharge gas (noble gas) to their excimer (Xe) state (high-energy orbital atoms form excimer excited molecules). The excimer-specific spectrum is emitted when atoms return from this excimer state to their original condition (ground state). This emission is called VUV light.
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