Atmospheric Pressure Plasma Irradiation Device

  • Liquid Crystal Display
  • Printed Circuit Board and PKG
  • Functional Materials

Easier dry cleaning
We have developed an Atmospheric Pressure Plasma Irradiation Device that combines our own reactor structure with the high-frequency power supply technology cultivated for excimer lamps.

Installed light source

Related papers

In-process monitoring of atmospheric pressure plasma jet etching using a confocal laser displacement sensor

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[] Ushio launches atmospheric pressure plasma irradiation unit “Lamina 5,” one of the smallest unit sizes in the industry

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