Ushio launches atmospheric pressure plasma irradiation unit “Lamina 5,” one of the smallest unit sizes in the industry
Enables irradiation for SEMI standard 510×515mm large substrates
Ushio Inc. (Head Office: Tokyo, President and CEO: Takabumi Asahi, hereinafter “Ushio”) is pleased to announce that from December 2024 Ushio will launch "Lamina 5," an atmospheric pressure plasma irradiation unit, which achieves dramatic reduction in unit size by adopting a unique electrode structure.
With conventional units, it was difficult to install them in-line due to space limitations because of their large sizes. Ushio's unique electrode structure enables a significant downsizing of the irradiation unit and installation in small areas where it has not been possible in the past.
Lamina 5 with an irradiation width of 550mm is now added to the existing Lamina 3A (irradiation width of 300mm) as part of the Lamina series, making it possible to handle large substrates such as the SEMI standard 510 x 515mm.
With conventional units, it was difficult to install them in-line due to space limitations because of their large sizes. Ushio's unique electrode structure enables a significant downsizing of the irradiation unit and installation in small areas where it has not been possible in the past.
Lamina 5 with an irradiation width of 550mm is now added to the existing Lamina 3A (irradiation width of 300mm) as part of the Lamina series, making it possible to handle large substrates such as the SEMI standard 510 x 515mm.
Irradiation unit (right) and power supply (left)
In addition to existing excimer systems, Ushio will expand Lamina Series to provide better solutions for cleaning and surface treatment processes for a variety of materials.The product will be displayed at Semicon Japan 2024 (Booth No. 5627) at Tokyo Big Sight from December 11th to 13th.
■Features
Can be additionally installed on an existing line or small areas
・Unique electrode structure achieves slim and compact design
・Can be installed in small areas where installation was previously not possible
Easy installation with fewer utilities
・Water cooling-free, air-cooled by process gas
・Only AC power supply, gas, and exhaust connections are required
Pursues processing efficiency per unit of electricity
・Achieves processing with approximately 50% less power input compared to competitors
・Reduces thermal damage through low-temperature processing
■Size/Weight
| Product name | Lamina 5 | |||
|---|---|---|---|---|
| Irradiation unit | Power supply | |||
| Width (mm)* | 650 | 448 | ||
| Length (mm)* | 53 | 700 | ||
| Height (mm)* | 77.2 | 199.6 | ||
| Weight (kg) | Approx .6 | Approx. 24 | ||
