Journal of the Surface Finishing Society of Japan, Vol. 75, No.12, 2024
Study on Wear Resistance and Surface Modification of Silicon Hard Coats by Vacuum Ultraviolet Light Irradiation
Akihiro SHIMIZU a, b and Shinji KAMBARA b
a Ushio Inc. (Japan)
b Gifu University (Japan)
Copyright © Ushio Inc. All Rights Reserved.
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