Journal of the Surface Finishing Society of Japan, Vol. 75, No.12, 2024

Study on Wear Resistance and Surface Modification of Silicon Hard Coats by Vacuum Ultraviolet Light Irradiation


 

Akihiro SHIMIZU a, b and Shinji KAMBARA b

  

a Ushio Inc. (Japan)
b Gifu University (Japan)



 
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