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Main applications and fields
LED Chip / Package
Ushio owns production process from Epitaxial to Package process to supply reliable LD/LED products for industrial market.
From Violet to Red to Infrared, Ushio can propose the best device to your application from our wider variety of wavelength,
power and packaging selection.
UV photoresist curing systems Unihard
This ultraviolet irradiation device is used for photoresist curing in LSI manufacturing lines.
Equipped with a super high-pressure UV lamp and an excimer lamp, this system is used for various applications such as enhancing plasma resistance during dry etching, photoresist outgassing and burn prevention during ion implantation, neutralizing electrical charge, removing stress and low-k curing.
Charge neutralization systems
Strong, deep ultraviolet irradiation neutralizes electric charge on EPROM and Flash memory. Neutralizes electric charge that can be problematic for plasma processing.
UV instant curing equipment Unicure System
High-power, compact UV curing and drying equipment achieves low-temperature processing. Lamps and other components can be selected according to the UV intensity and irradiation area required for the intended purpose.
Instruction manuals here
Spot UV irradiation units Spot Cure Series
The "Spot Cure Series" takes advantage of our light system technology cultivated for over 30 years, in pursuit of ease of use and environmental considerations. We offer a wide variety of lens and unit options to suit line and workpiece conditions.
Light source unit for inspection illumination Optical Modulex
Equipped with a high-intensity UV lamp, it provides high-precision collimated irradiation indispensable for inspection tasks. The desk-type light source unit has a track record of actual results for over 15 years as ideal for visual inspection of glass, film and lenses (and is the inspection light source recommended by the Glass Manufacturer's Association).
Xenon short arc lamps (~500W)
These xenon short arc lamps are high-intensity point light sources filled with xenon gas, having a continuous spectrum similar to daylight in the visible to infrared range: an excellent light source for accurate color rendering. These lamps are used as light sources for spectroscopy, microscopy, solar simulators and various types of inspections.
Compact xenon lamp
Ushio's UXR™ series xenon lamps have been developed based on our proprietary optimized design, using ceramic and sapphire as primary components to provide excellent resistance to impact and pressure. Major lamp features are compact size and light weight, with an integrated mirror to efficiently extract the exceptional color rendering properties of the light while eliminating the need for troublesome optical axis alignment.
Also, Ushio's proprietary sapphire window structure makes possible lamp replacement without interruption.
- This UV LED irradiation unit is available with a selection of multiple wavelengths for large-area, high-intensity and highly uniform irradiation.
- Ushio's proprietary installed lens minimizes the illuminance loss due to increased irradiation distance.
Proper irradiation is possible without fine adjustment for workpieces having varying thickness.
- Our lineup includes 100, 150, and 200 standard sizes
・Multiple mixed wavelength type designs are also available.
UV-LED for printing UniJet Series
Ushio's UniJet series consists of modular UV light sources that are optimally designed and
developed to satisfy the stringent demands of UV curing and printing.
This ideal light source technology has been developed as an alternative to conventional lamp-based
UV light sources, and are available with a variety of features, including water cooling, air cooling,
Ushio can provide variety of optimal solutions for cutomers demand by UniJet series.
Super-thin palm top UV irradiance meter UIT-θSeries