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“Curing and Bonding“ search result
Main applications and fields
LED Chip / Package
Ushio owns production process from Epitaxial to Package process to supply reliable LD/LED products for industrial market.
From Violet to Red to Infrared, Ushio can propose the best device to your application from our wider variety of wavelength,
power and packaging selection.
UV photoresist curing systems Unihard
This ultraviolet irradiation device is used for photoresist curing in LSI manufacturing lines.
Equipped with a super high-pressure UV lamp and an excimer lamp, this system is used for various applications such as enhancing plasma resistance during dry etching, photoresist outgassing and burn prevention during ion implantation, neutralizing electrical charge, removing stress and low-k curing.
Charge neutralization systems
Strong, deep ultraviolet irradiation neutralizes electric charge on EPROM and Flash memory. Neutralizes electric charge that can be problematic for plasma processing.
UV instant curing equipment Unicure System
High-power, compact UV curing and drying equipment achieves low-temperature processing. Lamps and other components can be selected according to the UV intensity and irradiation area required for the intended purpose.
Instruction manuals here
Spot UV irradiation units Spot Cure Series
The "Spot Cure Series" takes advantage of our light system technology cultivated for over 30 years, in pursuit of ease of use and environmental considerations. We offer a wide variety of lens and unit options to suit line and workpiece conditions.
Super high-pressure UV lamps (~500W)
Ushio's super high-pressure UV lamps have been developed to effectively utilize three ultraviolet wavelengths (436, 405 and 365 nm) as high-intensity light sources with stable irradiance and long life.
Since the lamp's arc size is nearly that of a point light source, the light can be readily converged and diffused by the optical system, and uniform illuminance distribution is easily obtained.
Deep UV lamps
These are high-intensity point light source mercury vapor-filled lamps based on xenon lamps.
They feature far-ultraviolet radiation in the 230 to 320 nm wavelength range, used for short-wavelength photochemical reactions, UV curing and lithography.
- This UV LED irradiation unit is available with a selection of multiple wavelengths for large-area, high-intensity and highly uniform irradiation.
- Ushio's proprietary installed lens minimizes the illuminance loss due to increased irradiation distance.
Proper irradiation is possible without fine adjustment for workpieces having varying thickness.
- Our lineup includes 100, 150, and 200 standard sizes
・Multiple mixed wavelength type designs are also available.
UV-LED for printing UniJet Series
Ushio's UniJet series consists of modular UV light sources that are optimally designed and
developed to satisfy the stringent demands of UV curing and printing.
This ideal light source technology has been developed as an alternative to conventional lamp-based
UV light sources, and are available with a variety of features, including water cooling, air cooling,
Ushio can provide variety of optimal solutions for cutomers demand by UniJet series.