Super high-pressure UV lamps (~500W)

Super high-pressure UV lamps (to 500 W)
  • Litho-Patterning
  • Inspection
  • Modification
  • Curing and Bonding
  • Optics
  • Illumination

Ushio's super high-pressure UV lamps have been developed to effectively utilize three ultraviolet wavelengths (436, 405 and 365 nm) as high-intensity light sources with stable irradiance and long life.
Since the lamp's arc size is nearly that of a point light source, the light can be readily converged and diffused by the optical system, and uniform illuminance distribution is easily obtained.

Wavelength Distribution Data (Example)
Resolution
- Semiconductor circuit formation light source
- LCD pattern formation light source
- Color filter pattern formation light source
- PCB pattern formation light source
- MEMS pattern formation light source
- Fluoresence microscope light source
- UV curing light source
- and other novel exposure applications

Model Rating: Lamp Input (W) Lamp Voltage (V) Horizontal irradiance
(µW/cm2)
Total luminous flux (lm) Inter-electrode cooling gap (mm) Average Lifespan (h) Product Specification
USH-102D 100 20 ±4 26 3000 0.5 200 PDF1015 KB
USH-103D 100 20±4 29 3300 0.6 200 PDF1016 KB
USH-200DP 200 57+7-8 82 13000 2.5 1000 PDF1027 KB
USH-205S 200 29±4 63 8000 1 1000 PDF1029 KB
USH-250D 250 40±6 106 13000 2 1000 PDF1029 KB
USH-350DS 350 60±6 155 22700 2.8 1000 PDF1035 KB
USH-350DP 350 60±6 152 22100 2.8 1000 PDF1035 KB
USH-500D 500 60±7 226 32200 4.5 800 PDF1031 KB
USH-508SA 500 76±9 209 35200 4 800 PDF1032 KB

Note: 1mW/cm2 = 1,000 µW/cm2

Installed light source