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Optical Microfabrication Services

USHIO

Application examples of transmission gratings

OCT: Optical Coherence Tomography

Grating suitable for OCT
・High diffraction efficiency over a wide band
・High spectral symmetry
・Less polarization dependence

For OCT

Optical Communication Element

Grating suitable for Optical Communication
・Optimized design for communication wavelengths.
・Low polarization dependence
・Since it is a quartz substrate, it is possible to create a structure suitable for GRISM.

For Optical Communication

Features of Ushio's Transmission Gratings

Performance

Features
・High diffraction efficiency over a wide band
・High spectral symmetry
・Less polarization dependence
・It does not break even if touched
(Handling / cleaning)

Performances

Ushio's fabrication technologies of high quality and high performances

Ushio microfabrication technology
・Submicron pitch fabrication
・High aspect structure
・Tapered structure

Underlying Fabrication Technologies of High-Quality Performances

  • Underlying Fabrication Technologies of High-Quality Performances
  • Underlying Fabrication Technologies of High-Quality Performances
  • Underlying Fabrication Technologies of High-Quality Performances

Specifications

Terms Details
Shapes Types of Periodic Structure (Grids, Holes, or Dots)
Pitch >150nm
Line Width 30~50% of the pitch
Pattern Height 〜200nm
Aspect Ratio ≦3
Seams between shots None