Optical Microfabrication


Our technologies for Microfabrication

Interference lithography

Interference lithography technology

About Interference lithography

Interference lithography is a lithography technique that applying light contrast generated by light interference. 
Because it uses light interference, the pattern created by this technology is finer than the wavelength of the light source.


Ushio can expose submicron patterns seamlessly and while adjusting curvature.

Equipment List

Main Equipment

Main Equipment Specifications

Application Name
Lithography Interference lithography tool
Stepper, Aligner
Film Formation ALD film deposition equipment
Magnetron Sputtering
Etching Plasma dry etcher
Cutting Dicing
Cleaning Two-fluid cleaning tool
Supercritical cleaning tool
Coating/Development Coater/developer
Evaluation SEM (scanning electron microscope)
AFM (atomic force microscope)