Our technologies for Microfabrication
Interference lithography
About Interference lithography
Interference lithography is a lithography technique that applying light contrast generated by light interference.
Because it uses light interference, the pattern created by this technology is finer than the wavelength of the light source.
Features
Ushio can expose submicron patterns seamlessly and while adjusting curvature.
Equipment List
Main Equipment
Main Equipment Specifications
| Application | Name |
|---|---|
| Lithography | Interference lithography tool |
| Stepper, Aligner | |
| Film Formation | ALD film deposition equipment |
| Magnetron Sputtering | |
| Etching | Plasma dry etcher |
| Cutting | Dicing |
| Cleaning | Two-fluid cleaning tool |
| Supercritical cleaning tool | |
| Coating/Development | Coater/developer |
| Evaluation | SEM (scanning electron microscope) |
| AFM (atomic force microscope) | |
| Spectroscope | |
| Ellipsometer |
