Ultraviolet (UV) /Excimer Irradiation Units/Atmospheric Pressure Plasma Irradiation Device



Cleaning and modification (Scanning irradiation)

Irradiation pattern Wavelength Irradiation method Irradiation area System type

Excimer Irradiation Units View more

Cleaning and modification Scanning irradiation Batch irradiation 172 nm, etc.
Scanning: 100 mm to 3,500 mm

  • HPV-ST series

  • HP-V series

  • SVS series
    (stage conveyor for large substrates)

  • Film Excimer series
    (horizontal transfer type)