Ultraviolet (UV) /Excimer Irradiation Units/Atmospheric Pressure Plasma Irradiation Device



Cleaning and modification (Batch irradiation)

Irradiation pattern Wavelength Irradiation method Irradiation area System type

Excimer Irradiation Units View more

Cleaning and modification Scanning irradiation Batch irradiation 172 nm, etc.
Surface light source: 100 mm to 340 mm
・Up to 730 mm × 920 mm available by special order

  • Small experimental system
    (for 100 mm)

  • SSP series surface light source

  • SVK series

  • SVC series
    (stand-alone system for large substrates)