Cleaning and modification (Batch irradiation)
| Irradiation pattern | Wavelength | Irradiation method | Irradiation area | System type | |
|---|---|---|---|---|---|
 Excimer Irradiation Units View more |
Cleaning and modification Scanning irradiation Batch irradiation | 172 nm, etc. |   |
Surface light source: 100 mm to 340 mm ・Up to 730 mm × 920 mm available by special order |
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