- 1.Features an integrated power supply for slim design
Atmospheric pressure plasma irradiator that combines high frequency power
supply technology developed for excimer lamps with Ushio’s reactor structure.
- 2.Low temperature treatment/low damage
Enables low-temperature processing, effective for irradiating resins and film substrates having low heat resistance.
High cooling efficiency enables reactor cooling with process gas only.
- 3.Long life and high reliability
・Reactor with a unique structure that is less affected by thermal expansion and more resistant to cracking
・Highly reliable high-frequency power supply, with over 5,000 units shipped
Requests and Inquiries
Inquiries by telephone 03-5657-1033