Atmospheric Pressure Plasma Irradiation DeviceEasier dry cleaning
We have developed an Atmospheric Pressure Plasma Irradiation Device that combines our own reactor structure with the high-frequency power supply technology cultivated for excimer lamps.
- Features
- 1.Features an integrated power supply for slim design
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Atmospheric pressure plasma irradiator that combines high frequency power
supply technology developed for excimer lamps with Ushio’s reactor structure. - 2.Low temperature treatment/low damage
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Enables low-temperature processing, effective for irradiating resins and film substrates having low heat resistance.
High cooling efficiency enables reactor cooling with process gas only. - 3.Long life and high reliability
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・Reactor with a unique structure that is less affected by thermal expansion and more resistant to cracking
・Highly reliable high-frequency power supply, with over 5,000 units shipped
Requests and Inquiries
Inquiries and requests for information
Inquiries by telephone 03-5657-1033
