Ultraviolet (UV) /Excimer Irradiation Units/Atmospheric Pressure Plasma Irradiation Device



Aligning (Batch irradiation)

Irradiation pattern Wavelength Irradiation method Irradiation area System type

Deep UV
multilight View more

Curring Scanning irradiation Batch irradiation 254,313,365,405 Φ135mm

  • Deep UV multilight

Photo-alignment View more

Aligning Scanning irradiation Batch irradiation 200nm to 600nm
* Broad wavelength
* Split polarization wavelength ranges available

Scan: Width 100 mm to 3,000 mm
Surface light source: 80 mm
・Custom orders negotiable

  • R&D experimental system 1.5 kW

  • R&D experimental system 6 kW

  • Single mass-production irradiator

  • Mass-production machine irradiation system + Stage