Irradiation pattern | Wavelength | Irradiation method | Irradiation area | System type | |
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![]() Excimer Irradiation Units View more |
Cleaning and modification Scanning irradiation Batch irradiation | 172 nm, etc. | ![]() ![]() |
Scanning: 100 mm to 3,500 mm Surface light source: 100 mm to 340 mm ・Up to 730 mm × 920 mm available by special order |
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![]() UV-LED View more |
Curring Scanning irradiation Batch irradiation | 365,385,395,405 | ![]() ![]() |
Scanning: 60 mm minimum to 3500 mm maximum *1 *1. Because the irradiator is connectable, the maximum irradiation area can be expanded. Surface light source: 100 mm to 200mm *2 *2. Sizes other than those above are also available. |
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![]() SP11 View more |
Curring Spot irradiation | 300 to 600nm * Broad wavelength |
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Fiber diameter ①φ3.5mm, ②φ5mm * Irradiation diameter is selectable by attaching optional lenses |
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![]() SP-LED3 View more |
Curring Spot irradiation | 365nm | ![]() |
Standard: φ3mm, φ10mm |
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![]() SP-IR View more |
Curring Spot irradiation | 300nm~1000nm | ![]() |
Standard: φ5mm |
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![]() Photo-alignment View more |
Aligning Scanning irradiation Batch irradiation | 200nm to 600nm * Broad wavelength * Split polarization wavelength ranges available |
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Scan: Width 100 mm to 3,000 mm Surface light source: 80 mm ・Custom orders negotiable |
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![]() Deep UV |
Curring Scanning irradiation Batch irradiation | 254,313,365,405 | ![]() |
Φ135mm |
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