Ultraviolet (UV) /Excimer Irradiation Units/Atmospheric Pressure Plasma Irradiation Device

USHIO

Irradiation pattern Wavelength Irradiation method Irradiation area System type

Excimer Irradiation Units View more

 Cleaning and modification Scanning irradiation Batch irradiation 172 nm, etc.
Scanning: 100 mm to 3,500 mm
Surface light source: 100 mm to 340 mm
・Up to 730 mm × 920 mm available by special order

  • Small experimental system
    (for 100 mm)

  • 340-mm-compatible SSP series surface light source
    ～Surface light source/SSP series～

  • HPV-ST series

  • HP-V series

  • SVC series
    (stand-alone system for large substrates)

  • SVS series
    (stage conveyor for large substrates)

  • Film Excimer series
    (horizontal transfer type)

UV-LED View more

 Curring Scanning irradiation Batch irradiation 365,385,395,405
Scanning: 60 mm minimum to 3500 mm maximum *1
*1. Because the irradiator is connectable, the maximum irradiation area can be expanded.
Surface light source: 100 mm to 200mm *2
*2. Sizes other than those above are also available.

  • EⅡHD
    EZHD

  • EⅡHC
    EZHC

  • i/iⅡ

  • iⅢ

  • iⅡSlim

SP11 View more

 Curring Spot irradiation 300 to 600nm
* Broad wavelength		 Fiber diameter
①φ3.5mm, ②φ5mm
* Irradiation diameter is selectable by attaching optional lenses

  • SP11

SP-LED3 View more

 Curring Spot irradiation 365nm Standard: φ3mm, φ10mm

  • SP-LED-3

SP-IR View more

 Curring Spot irradiation 300nm～1000nm Standard: φ5mm

  • SP-IR

Photo-alignment View more

 Aligning Scanning irradiation Batch irradiation 200nm to 600nm
* Broad wavelength
* Split polarization wavelength ranges available
Scan: Width 100 mm to 3,000 mm
Surface light source: 80 mm
・Custom orders negotiable

  • R&D experimental system 1.5 kW

  • R&D experimental system 6 kW

  • Single mass-production irradiator

  • Mass-production machine irradiation system + Stage

Deep UV
multilight View more

 Curring Scanning irradiation Batch irradiation 254,313,365,405 Φ135mm

  • Deep UV multilight