Irradiation pattern | Wavelength | Irradiation method | Irradiation area | System type | |
---|---|---|---|---|---|
Excimer Irradiation Units View more |
Cleaning and modification Scanning irradiation Batch irradiation | 172 nm, etc. | Scanning: 100 mm to 3,500 mm Surface light source: 100 mm to 340 mm ・Up to 730 mm × 920 mm available by special order |
|
|
UV-LED View more |
Curring Scanning irradiation Batch irradiation | 365,385,395,405 | Scanning: 60 mm minimum to 3500 mm maximum *1 *1. Because the irradiator is connectable, the maximum irradiation area can be expanded. Surface light source: 100 mm to 200mm *2 *2. Sizes other than those above are also available. |
|
|
SP11 View more |
Curring Spot irradiation | 300 to 600nm * Broad wavelength |
Fiber diameter ①φ3.5mm, ②φ5mm * Irradiation diameter is selectable by attaching optional lenses |
|
|
SP-LED3 View more |
Curring Spot irradiation | 365nm | Standard: φ3mm, φ10mm |
|
|
SP-IR View more |
Curring Spot irradiation | 300nm~1000nm | Standard: φ5mm |
|
|
Photo-alignment View more |
Aligning Scanning irradiation Batch irradiation | 200nm to 600nm * Broad wavelength * Split polarization wavelength ranges available |
Scan: Width 100 mm to 3,000 mm Surface light source: 80 mm ・Custom orders negotiable |
|
|
Deep UV |
Curring Scanning irradiation Batch irradiation | 254,313,365,405 | Φ135mm |
|