UV-LED Irradiation UnitsFor Faster UV-Curable Resin and Adhesive Curing in Semiconductor Processes
Our UV-LED irradiation system promotes the photopolymerization reaction of UV-curable resins using ultraviolet (UV) light, enabling faster curing of UV-curable resins and adhesives used in semiconductor processes. Compared with conventional mercury lamps and metal halide lamps, UV-LED offers key advantages such as lower power consumption, longer service life, reduced heat on the irradiated workpace.
- Features
- Use Cases
- 1. Higher Efficiency and Energy Savings
UV-LED delivers lower power consumption than conventional mercury lamps and offers higher energy efficiency.
- 2. Longer Service Life
UV-LED offers a long operating life, reducing replacement frequency and lowering overall maintenance costs.
- 3. Instant on/off
With an extremely short start-up time, UV-LED enables rapid on/off switching, contributing to greater process efficiency.
- 4. Reduced Environmental Impact
Unlike mercury lamps, UV-LED does not contain hazardous substances, making it a more environmentally friendly solution.
- 1. Photoresist Curing
After resist exposure, UV-LED is used to promote curing of the photoresist. Rapid curing can be achieved in a short time, contributing to improved production efficiency.
- 2. Exposure of Alignment Marks
UV-LED is used in the exposure process of alignment marks for wafer positioning, enabling highly precise alignment.
- 3. Curing of UV-curable Adhesives
In semiconductor packaging processes, UV-LED is used to cure UV-curable adhesives. Low-temperature, short-time curing helps minimize thermal damage to components.
- 4. UV Tape Peel-Off Process (Adhesion Reduction)
In back-grinding and dicing processes, UV-LED irradiation helps reduce adhesive strength, facilitating easy and clean peeling.
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Inquiries by telephone 03-5657-1033
