Products
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Photo alignment UV irradiation equipment | Ushio's photo-alignment technology makes full use of advanced polarization and optical and mechanical design technologies, enabling us to propose optimal systems to our customers. We have optical components that are optimal for various material sensitivities, including 254, 313 and 365 nm. Our systems are also characterized by high exposure and highly uniform irradiation with high-power input.We propose systems that suit customers' work, from small to large. |
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UV-LED Irradiation Units | Speedy Curing Smart Energy Saving UV Irradiation Units provide the illuminance and cumulative exposure required to replace conventional UV lamp systems, while improving usability such as by longer life, lower power consumption, instant on/off, and less heating of the irradiated object. In addition, Ushio's UV-LED Irradiation Units promise to solve all kinds of customer problems with its "9" unique technologies. |
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Large field stepper UX-5 Series | Ushio provides specialized steppers for cutting-edge packaging applications employed in servers and PCs, and in portable devices such as smart phones and tablet PCs. The stepper is intended for package substrates using a stage corresponding to the panel size and Ushio's proprietary large-area projection lens technology cultivated from many years of expertise in light source and optical technology. High productivity is achieved while realizing the high resolution and overlay accuracy required for the latest packaging substrates. |
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Full field projection aligner UX-4 Series | This projection aligner uses our unique large area projector lens technology, light source and other optical technologies developed by Ushio over many years. Provides one-shot exposure of up to 8-inch wafers without touching the mask. Large depth of field enables proper exposure of non-flat wafers, achieving higher productivity and yield not possible with a proximity aligner. |
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Roll to roll lithography tool UFX Series | Currently Ushio's proximity/projection exposure systems for flexible substrates have a track record of over 800 units. Highly efficient high-resolution exposure is achieved by a projector lens that makes full use of our specially developed high-output lamp and our established reputation in optical system technology. |
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UV Irradiation Unit “SP-LED-3” | LED Spot Irradiation Unit that pursues “low cost,” “ease of use,” and “no mercury.” Head types are available from Φ3mm to Φ10mm, enabling irradiation to the required areas. |
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Multipurpose exposure unit Multilight | “Multilight” provides an even light source for a variety of uses, including precision pattern exposure, pattern exposure for semi-conductor elements, and wafer exposure.
*This is The USHIOLIGHTING INC's product. |
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Super high-pressure UV lamps (~500W) | Ushio's super high-pressure UV lamps have been developed to effectively utilize three ultraviolet wavelengths (436, 405 and 365 nm) as high-intensity light sources with stable irradiance and long life. Since the lamp's arc size is nearly that of a point light source, the light can be readily converged and diffused by the optical system, and uniform illuminance distribution is easily obtained. |
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Super high-pressure UV lamps (500W~35kW) | Jointly developed with device manufacturers in response to their increasingly diverse needs, these lithographic UV lamps have earned high acclaim as well as user trust. From our broad lineup of 500 W to 35 kW class lamps, we can offer optimum irradiation solutions to bolster your productivity and improve yields. We can also develop lamps tailored to new devices developed by your company. ■The Operating Manual is Here (requires member registration) ■The Frequently Asked Questions is Here |
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Xenon short arc lamps (~500W) | These xenon short arc lamps are high-intensity point light sources filled with xenon gas, having a continuous spectrum similar to daylight in the visible to infrared range: an excellent light source for accurate color rendering. These lamps are used as light sources for spectroscopy, microscopy, solar simulators and various types of inspections. |
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Deep UV lamps | These are high-intensity point light source mercury vapor-filled lamps based on xenon lamps. They feature mean(middle) ultraviolet radiation in the 230 to 320 nm wavelength range, used for short-wavelength photochemical reactions, UV curing and lithography. |
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UniCube M Series UV LED light source for batch irradiation |
The UniCube series offers breakthrough performance for batch irradiation. It is the world’s first LED module that can irradiate areas from 50 x 50 mm to 400 x 400 mm in a single batch. Ushio’s unique four-way coupling technology achieves high intensity, which in turn enables uniform curing of the entire area. This results in stable manufacturing processes and improved product quality. In addition, the UniCube series is characterized by its easy maintenance and long-lasting, stable performance. |
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UV-LED for printing UniJet Series | Ushio's UniJet series consists of modular UV light sources that are optimally designed and developed to satisfy the stringent demands of UV curing and printing. This ideal light source technology has been developed as an alternative to conventional lamp-based UV light sources, and are available with a variety of features, including water cooling, air cooling, and dimming. Ushio can provide variety of optimal solutions for cutomers demand by UniJet series. |
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Super-thin palm top UV irradiance meter UIT-θSeries | This wireless LED-dedicated irradiance meter is only 4.9 mm thick. Measures optical film coatings, adhesion of precision optical parts and lenses, and UV printing processes between light source and object even in hard-to-reach locations. ■ Operating Manual and Troubleshooting are Here (requires member registration) |
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