Roll to roll lithography tool UFX Series
- MEMS, Electronic Components
- Liquid Crystal Display
- Printed Circuit Board and PKG
Currently Ushio's proximity/projection exposure systems for flexible substrates have a track record of over 800 units.
Highly efficient high-resolution exposure is achieved by a projector lens that makes full use of our specially developed high-output lamp and our established reputation in optical system technology.
TAB and more
UFX series lineup
|Exposure area||□250 mm||□140mm|
|Tape width||～250 mm||～160mm|
|Resolution||5 µm L/S||4 µm L/S||7 µm L/S|
|Exposure Wavelength||i line||i line||iｈ line|
Installed light source
Note Regarding Exportation
This equipment (or technology) may be subject to security controls under the provisions of the Foreign Exchange and Foreign Trade Control Law, and in order to export the equipment or technology (or to conduct transactions for the purpose of providing the technology to a non-resident or foreign country), it may be necessary to obtain an export permit (or permission to implement service transactions) from the Minister of Economy, Trade and Industry. Be sure to contact us in advance for confirmation.