Roll to roll lithography tool UFX Series
![Roll-to-roll lithography tool UFX Series](./product_file/file/1026_ufx_01_en.jpg)
- Litho-Patterning
- MEMS, Electronic Components
- Semiconductors
- Printed Circuit Board and PKG
Currently Ushio's proximity/projection exposure systems for flexible substrates have a track record of over 800 units.
Highly efficient high-resolution exposure is achieved by a projector lens that makes full use of our specially developed high-output lamp and our established reputation in optical system technology.
Model list
![](./product_file/file/1026_uxseries_lineup_04_en.jpg)