Multipurpose exposure unit Multilight

Multi-purpose exposure unit (Multilight)
  • Litho-Patterning
  • Semiconductors
  • Liquid Crystal Display

“Multilight” provides an even light source for a variety of uses, including precision pattern exposure, pattern exposure for semi-conductor elements, and wafer exposure.

*This is The USHIOLIGHTING INC's product.

- Provides highly collimated, highly uniform i-line, h-line and g-line irradiation
- Easily select wavelengths by adding filters
- Plenty of options such as air shutters
- No utilities other than electricity required (less than 500 W)
Lithography lamp housing This is mainly used as an aligner lamp housing for the following applications.

Semiconductor manufacturing
Semiconductor baking and mask inspection, wafer periphery exposure, whole-surface wafer exposure, water damage inspection

Precision equipment
CD optical pickup lens bonding, magnetic head bonding, fiber coating, electronic component bonding, crystal oscillator exposure, TAB exposure, FPC exposure, large-area full-field projection lithography tools

Others
LED aligner and various optical experiments
 

250 W Series

Light Source Unit / Irradiation Unit External View
External View 1. With 100 mm irradiation diameters
External View 2. With 135, 165 and 200 mm irradiation diameters
Specifications
Irradiation Optical
Unit Model		 Irradiation diameter
(mm)		 Illuminance (mW/cm2) Illuminance uniformity
(%)		 Viewing angle Irradiation direction A B C D E F G H I Weight External View
II IG
PM25C-100 100 25 or more 35 or more ±5 ±3.5° Any 160 299 234 120 151 176 279 86 34 Approx. 16kg 1
PM25C-135 135 14 or more 20 or more ±5 ±2.6° Every 90 degrees
4 directions		 223 432 330 180 239 225 296 113 96 Approx. 17 kg 2
PM25C-165 165 9 or more 13 or more ±5 ±2.2° 253 507 405 215 314 270 296 143 96 Approx. 18kg 2
PM25C-200 200 6 or more 8 or more ±5 ±1.8° 303 607 505 265 414 325 296 173 96 Approx. 18kg 2

Note: Illuminance values are measured by Ushio Model UVD-365PD (II) and UVD-405PD (IG) detectors. (Initial guaranteed values)
 

500W Series

 
Light Source Unit / Irradiation Optical Unit External View
External View 1. With 100 mm irradiation diameters
External View 2. With 135, 160 and 200 mm irradiation diameters
External View 3. With 220 mm irradiation diameter
Specifications
Irradiation Optical
Unit Model		 Irradiation diameter
(mm)		 Illuminance (mW/cm2) Illuminance uniformity
(%)		 Viewing angle Irradiation direction A B C D E F G H Weight External View
II IG
PM50C-100A1 100 72 or more 106 or more ±5 ±4.4° Any 503 203 144 229 145.5 169.5 143 167 Approx. 25 kg 1
PM50C-135A1 135 40 or more 58 or more ±5 ±5.4° Downward irradiation 574 274 225 71 200 271 82 φ208 Approx. 30 kg 2
PM50C-160A1 160 28 or more 41 or more ±5 ±2.8° 612 312 225 88 235.5 323.5 120 φ232 Approx. 30 kg 2
PM50C-200A1 200 18 or more 26 or more ±5 ±2.2° 632 332 225 181 295.5 476.5 120 φ276 Approx. 30kg 2
PM50C-220A1 220 15 or more 21 or more ±5 ±2.0° 607 307 240 203 320 560 182 φ294 Approx. 30kg 3

Note: Illuminance values are measured by Ushio Model UVD-365PD (II) and UVD-405PD (IG) detectors. (Initial guaranteed values)

Installed light source

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