Full field projection aligner UX-4 Series
![Full-field projection aligner UX-4 Series](./product_file/file/1025_ux4_01_en.jpg)
- Litho-Patterning
- MEMS, Electronic Components
- Semiconductors
- Printed Circuit Board and PKG
This projection aligner uses our unique large area projector lens technology, light source and other optical technologies developed by Ushio over many years. Provides one-shot exposure of up to 8-inch wafers without touching the mask. Large depth of field enables proper exposure of non-flat wafers, achieving higher productivity and yield not possible with a proximity aligner.
Model list
![](./product_file/file/1025_uxseries_lineup_02_en.jpg)