Products
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Product name | Product description | Main applications and fields | Wavelength | ||
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Photo alignment UV irradiation equipment | Ushio's photo-alignment technology makes full use of advanced polarization and optical and mechanical design technologies, enabling us to propose optimal systems to our customers. We have optical components that are optimal for various material sensitivities, including 254, 313 and 365 nm. Our systems are also characterized by high exposure and highly uniform irradiation with high-power input.We propose systems that suit customers' work, from small to large. |
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UV-LED Irradiation Units | Speedy Curing Smart Energy Saving UV Irradiation Units provide the illuminance and cumulative exposure required to replace conventional UV lamp systems, while improving usability such as by longer life, lower power consumption, instant on/off, and less heating of the irradiated object. In addition, Ushio's UV-LED Irradiation Units promise to solve all kinds of customer problems with its "9" unique technologies. |
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Laser Diodes(LD) | With over 40 years of considerable experience in photonics industry, Ushio Inc., provides varies products selection in a wide wavelength range from violet to infrared for a broad range of applications such as display, medical, industrial tools(sensor and leveler), printer and more. |
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LED Chip / Package | Ushio owns production process from Epitaxial to Package process to supply reliable LD/LED products for industrial market. From Violet to Red to Infrared, Ushio can propose the best device to your application from our wider variety of wavelength, power and packaging selection. |
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Large field stepper UX-5 Series UX-7 Series | Ushio provides specialized steppers for cutting-edge packaging applications employed in servers and PCs, and in portable devices such as smart phones and tablet PCs. The stepper is intended for package substrates using a stage corresponding to the panel size and Ushio's proprietary large-area projection lens technology cultivated from many years of expertise in light source and optical technology. High productivity is achieved while realizing the high resolution and overlay accuracy required for the latest packaging substrates. |
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Full field projection aligner UX-4 Series | This projection aligner uses our unique large area projector lens technology, light source and other optical technologies developed by Ushio over many years. Provides one-shot exposure of up to 8-inch wafers without touching the mask. Large depth of field enables proper exposure of non-flat wafers, achieving higher productivity and yield not possible with a proximity aligner. |
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Roll to roll lithography tool UFX Series | Currently Ushio's proximity/projection exposure systems for flexible substrates have a track record of over 800 units. Highly efficient high-resolution exposure is achieved by a projector lens that makes full use of our specially developed high-output lamp and our established reputation in optical system technology. |
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Spot UV irradiation units | The "Spot Cure Series" takes advantage of our light system technology cultivated for over 30 years, in pursuit of ease of use and environmental considerations. We offer a wide variety of lens and unit options to suit line and workpiece conditions. |
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Multipurpose exposure unit Multilight | “Multilight” provides an even light source for a variety of uses, including precision pattern exposure, pattern exposure for semi-conductor elements, and wafer exposure.
*This is The USHIOLIGHTING INC's product. |
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Super high-pressure UV lamps (~500W) | Ushio's super high-pressure UV lamps have been developed to effectively utilize three ultraviolet wavelengths (436, 405 and 365 nm) as high-intensity light sources with stable irradiance and long life. Since the lamp's arc size is nearly that of a point light source, the light can be readily converged and diffused by the optical system, and uniform illuminance distribution is easily obtained. |
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Super high-pressure UV lamps (500W~35kW) | Jointly developed with device manufacturers in response to their increasingly diverse needs, these lithographic UV lamps have earned high acclaim as well as user trust. From our broad lineup of 500 W to 35 kW class lamps, we can offer optimum irradiation solutions to bolster your productivity and improve yields. We can also develop lamps tailored to new devices developed by your company. ■The Operating Manual is Here (requires member registration) ■The Frequently Asked Questions is Here |
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Xenon short arc lamps (~500W) | These xenon short arc lamps are high-intensity point light sources filled with xenon gas, having a continuous spectrum similar to daylight in the visible to infrared range: an excellent light source for accurate color rendering. These lamps are used as light sources for spectroscopy, microscopy, solar simulators and various types of inspections. |
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Compact xenon lamp | Ushio's UXR™ series xenon lamps have been developed based on our proprietary optimized design, using ceramic and sapphire as primary components to provide excellent resistance to impact and pressure. Major lamp features are compact size and light weight, with an integrated mirror to efficiently extract the exceptional color rendering properties of the light while eliminating the need for troublesome optical axis alignment. Also, Ushio's proprietary sapphire window structure makes possible lamp replacement without interruption. |
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Deep UV lamps | These are high-intensity point light source mercury vapor-filled lamps based on xenon lamps. They feature mean(middle) ultraviolet radiation in the 230 to 320 nm wavelength range, used for short-wavelength photochemical reactions, UV curing and lithography. |
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UV-LED uniform surface illumination light source UniField | - This UV LED irradiation unit is available with a selection of multiple wavelengths for large-area, high-intensity and highly uniform irradiation. - Ushio's proprietary installed lens minimizes the illuminance loss due to increased irradiation distance. Proper irradiation is possible without fine adjustment for workpieces having varying thickness. - Our lineup includes 100, 150, and 200 standard sizes ・Multiple mixed wavelength type designs are also available. |
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UV-LED for printing UniJet Series | Ushio's UniJet series consists of modular UV light sources that are optimally designed and developed to satisfy the stringent demands of UV curing and printing. This ideal light source technology has been developed as an alternative to conventional lamp-based UV light sources, and are available with a variety of features, including water cooling, air cooling, and dimming. Ushio can provide variety of optimal solutions for cutomers demand by UniJet series. |
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Super-thin palm top UV irradiance meter UIT-θSeries | This wireless LED-dedicated irradiance meter is only 4.9 mm thick. Measures optical film coatings, adhesion of precision optical parts and lenses, and UV printing processes between light source and object even in hard-to-reach locations. ■ Operating Manual and Troubleshooting are Here (requires member registration) |
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