ライトエッジ2024
主に2023年度の発表物を収集・掲載しました。
（2024年01月）
2023 International Conference on Electronics Packaging
Surface Modification of Cyclo Olefin Polymer Film for Electronic Packaging by Vacuum Ultraviolet Irradiation
SPIE Advanced Lithography + Patterning
Fabrication process of flexibly patterned grating by interference lithography system with automated beam alignment moduleJOURNAL OF MICRO/NANOPATTERNING, MATERIALS, AND METROLOGY
Development of panel-level organic lithography equipment for advanced packagingApplied Physics Express
Fabrication of vertical AlGaN-based ultraviolet-B laser diodes using a laser lift-off methodTransactions of The Japan Institute of Electronics Packaging
Study of Color Change Characteristics of Plasma Indicators by Vacuum Ultraviolet Light from Excimer Lamps北米電気化学会 The Electrochemical Society
Improved Adhesion of Direct Copper Seed Layer by Medium-Vacuum Sputtering Using Vacuum Ultraviolet LightIEEE Journal of the Electron Devices Society
Energy-Efficient Annealing Process of Ferroelectric Hf0.5Zr0.5O2 Capacitor Using Ultraviolet-LED for Green ManufacturingJournal of Micromechanics and Microengineering
Evaluation of solvent releases from microfluidic devices made of cycloolefin polymer by temperature-desorption mass spectrometry
